Polymeric fiber CMP pad and associated methods
View Patent ↗Polishing tools and their methods of manufacture and use are disclosed. In one aspect, a polishing device is provided, including a plurality of polymeric fibers longitudinally arranged and embedded in a polymeric binder, the polymeric binder having a stiffness that is less than a stiffness of the polymeric fibers, and a working end of the plurality of polymeric fibers configured such that tips of the polymeric fibers are oriented to contact a work piece.
1. A chemical mechanical polishing device, comprising:
a plurality of polymeric fibers longitudinally arranged and embedded in a polymeric binder, the polymeric binder having a Young's Modulus that is less than a Young's Modulus of the polymeric fibers, wherein the polymeric fibers are impregnated with abrasive nanodiamond particles; and
a working end of the plurality of polymeric fibers configured such that tips of the polymeric fibers are oriented to contact a work piece.
2. The device of claim 1 , wherein the polymeric fibers are arranged in the polymeric binder with a center-to-center spacing of from about 2 times the diameter of the polymeric fibers to about 10 times the diameter of the polymeric fibers.
3. The device of claim 1 , wherein the polymeric fibers are arranged in the polymeric binder with a center-to-center spacing from about 3 times the diameter of the polymeric fibers to about 8 times the diameter of the polymeric fibers.
4. The device of claim 1 , wherein the polymeric fibers are arranged in the polymeric binder with a center-to-center spacing of from about 4 times the diameter of the polymeric fibers to about 6 times the diameter of the polymeric fibers.
5. The device of claim 1 , wherein the polymeric fibers have a diameter of from about 2 microns to about 50 microns.
6. The device of claim 1 , wherein the polymeric fibers have a diameter of from about 5 microns to about 20 microns.
7. The device of claim 1 , wherein the tips of the polymeric fibers protrude from the polymeric binder at the working end to a distance of less than about 20 microns.
8. The device of claim 1 , wherein the tips of the polymeric fibers protrude from the polymeric binder at the working end to a distance of less than about 10 microns.
9. The device of claim 1 , wherein the polymeric fibers include a member selected from the group consisting of polyphenols, polyurethanes, polyamides, aromatic polyamides, polycarbamides, polycarbonates, polyimides, polyphenylene sulfides, polyesters, epoxies, celluloses, polyvinylchorides, polyvinyl alcohols, nylons, polypropylenes, acrylics, polyethylenes, and combinations and copolymers thereof.
10. The device of claim 1 , wherein the polymeric binder includes a member selected from the group consisting of polyethylenes, polyvinyl chlorides, polyvinyl fluorides, polyphenols, polypropylenes, polystyrenes, acrylics, polyurethanes, polyether urethanes, polyester, polycarbonates, polysilicones, polyacrylates, polymethelmethacrylate, polyaramides, celluloses, epoxies, polybutadienes, polyisoprenes, polychloroprenes, isobutenes, and combinations and copolymers thereof.
11. The device of claim 10 , wherein the polymeric binder includes a polyphenol.
12. The device of claim 1 , further comprising conductive particles impregnated within the polymeric fibers and/or the polymeric binder.
13. The device of claim 12 , wherein the conductive particles include a conductive graphite material.
14. The device of claim 1 , wherein the polymeric binder is porous.
15. The device of claim 1 , further comprising at least one polymeric spacing fiber contacting at least a portion of the plurality of polymeric fibers to provide spacing between the plurality of polymeric fibers.
16. The device of claim 1 , wherein the plurality of polymeric fibers is a plurality of bundles of polymeric fibers.