Nanostructure insulated junction field effect transistor
View Patent ↗A novel nanostructure device operating in Junction Field Effect Transistor (JFET) mode is provided that avoids the majority of the carriers that interact with the interface (e.g. surface roughness, high-k scattering).
1. A nanostructure-insulated junction field effect transistor comprising:
a uniformly doped nanostructure having a length L N and a radius R, wherein the uniformly doped nanostructure has a dopant concentration profile that is uniform along the central symmetry axis and the longitudinal axis;
a gate electrode wrapped at least partially around the uniformly doped nanostructure and having a length L G ; and
an insulating layer having a thickness t ox wrapped at least partially around the uniformly doped nanostructure and situated in between the uniformly doped nanostructure and the gate electrode, wherein the insulating layer covers the uniformly doped nanostructure along its longitudinal axis such that the gate electrode makes no direct contact with the uniformly doped nanostructure.
2. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is uniformly doped with a donor density N D , wherein N D is from about 10 16 cm −3 to about 10 20 cm −3 .
3. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is uniformly doped with a donor density N D , wherein N D is from about 10 18 cm −3 to about 10 20 cm −3 , and wherein R is from about 5 nm to about 20 nm.
4. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is a uniformly doped nanowire, wherein R is from about 2 nm to about 20 nm and L N is from about 20 to about 100 nm.
5. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is a uniformly doped nanowire, wherein R is from about 2 nm to about 20 nm and L N is about 60 nm.
6. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is uniformly doped with an n-type dopant.
7. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is uniformly doped with a p-type dopant.
8. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is an n-type uniformly doped nanowire comprising at least one material selected from the group consisting of Si, Ge, GaAs, and a metal.
9. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the uniformly doped nanostructure is a p-type uniformly doped nanowire comprising at least one material selected from the group consisting of Si, Ge, GaAs, and a metal.
10. The nanostructure-insulated junction field effect transistor of claim 1 , wherein a portion of the insulating layer wrapped around the uniformly doped nanostructure has a length L I and comprises an oxide layer.
11. The nanostructure-insulated junction field effect transistor of claim 10 , wherein the oxide layer comprises SiO 2 .
12. A nanostructure-insulated junction field effect transistor comprising:
a uniformly doped nanostructure having a length L N and a radius R;
a gate electrode wrapped at least partially around the uniformly doped nanostructure and having a length L G ; and
an insulating layer having a thickness t ox wrapped at least partially around the uniformly doped nanostructure and situated in between the uniformly doped nanostructure and the gate electrode, wherein the insulating layer covers the uniformly doped nanostructure along its longitudinal axis such that the gate electrode makes no direct contact with the uniformly doped nanostructure, wherein a portion of the insulating layer wrapped around the uniformly doped nanostructure has a length L I and comprises an oxide layer, and wherein the gate electrode comprises a conductive material with a workfunction of from about 3 to about 5, and wherein L G ≦L I .
13. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the insulating layer and the gate electrode are completely wrapped around the uniformly doped nanostructure.
14. The nanostructure-insulated junction field effect transistor of claim 1 , wherein the insulating layer covers the uniformly doped nanostructure along its whole length in a longitudinal direction.
15. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is uniformly doped with a donor density N D , wherein N D is from about 10 16 cm −3 to about 10 20 cm −3 .
16. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is uniformly doped with a donor density N D , wherein N D is from about 10 18 cm −3 to about 10 20 cm −3 , and wherein R is from about 5 nm to about 20 nm.
17. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is a uniformly doped nanowire, wherein R is from about 2 nm to about 20 nm and L N is from about 20 to about 100 nm.
18. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is a uniformly doped nanowire, wherein R is from about 2 nm to about 20 nm and L N is about 60 nm.
19. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is uniformly doped with an n-type dopant.
20. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is uniformly doped with a p-type dopant.
21. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is an n-type uniformly doped nanowire comprising at least one material selected from the group consisting of Si, Ge, GaAs, and a metal.
22. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the uniformly doped nanostructure is a p-type uniformly doped nanowire comprising at least one material selected from the group consisting of Si, Ge, GaAs, and a metal.
23. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the insulating layer and the gate electrode are completely wrapped around the uniformly doped nanostructure.
24. The nanostructure-insulated junction field effect transistor of claim 12 , wherein the insulating layer covers the uniformly doped nanostructure along its whole length in a longitudinal direction.