Particle Deposition System and Method
A deposition system for depositing a chemical vapor onto a workpiece, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
1 . A deposition system for depositing silica particles onto a workpiece comprising:
a burner for depositing the particles onto the workpiece;
a lathe for holding the workpiece and for rotating and translating the workpiece relative to the burner; and
a computer for controlling the translating and rotating of the workpiece relative to the burner;
wherein the lathe is for at times translating the workpiece at a rate of greater than about 1.4 meters per minute.
2 - 51 . (canceled)