Deflecting a beam of electrically charged particles onto a curved particle path

1. A device for deflecting a beam of electrically charged particles onto a curved particle path, the device comprising:

at least one beam guidance magnet having a coil system that has at least one coil curved along the particle path for deflecting the beam onto a curved particle path,

at least one scanner magnet that variably deflects the beam in a y,z plane at right angles to the particle path, and

at least one correction system that regulates or controls the particle path using electric and/or magnetic fields as a function of the position of the beam in the y,z plane.

2. The device as claimed in claim 1 , wherein the correction system is operable to correct a deviation of the particle path from a reference value in the y,z plane and/or to correct a deviation of the particle path from a beam direction parallel to a main beam direction.

3. The device as claimed in claim 1 , wherein the correction system comprises a correction regulating or control unit that generates a regulating or control signal and a correction deflection unit that is operable to change the particle path as a function of the regulating or control signal.

4. The device as claimed in claim 1 , wherein the correction deflection unit includes at least one electrode pair in the form of a parallel-plate capacitor.

5. The device as claimed in claim 4 , wherein the correction deflection unit comprises a first parallel-plate capacitor that is operable to generate a first deflection of the beam in a first direction in the y,z plane, and a second parallel-plate capacitor that is operable to generate a further deflection of the beam in a direction at right angles to the first direction in the y,z plane.

6. The device as claimed in claim 1 , wherein the correction deflection unit includes at least one correction coil.

7. The device as claimed in claim 6 , wherein at least two correction coils are arranged oppositely in pairs in the correction deflection unit.

8. The device as claimed in claim 7 , wherein the correction deflection unit comprises a first pair of correction coils, which are operable to generate a deflection of the beam in a first direction in the y,z plane, and a second pair of correction coils which are operable to generate a further deflection of the beam in a direction at right angles to the first direction in the y,z plane.

9. The device as claimed in claim 1 , wherein the correction system is controlled by correction current and/or correction voltage, the correction current and/or correction voltage being independent of a control current of the at least one beam guidance magnet.

10. The device as claimed in claim 1 , wherein the at least one scanner magnet is arranged along the movement direction of the particles upstream of the at least one beam guidance magnet.

11. The device as claimed in claim 1 , wherein the at least one correction deflection unit is disposed in an area of the beam exit of the at least one beam guidance magnet.

12. The device as claimed in claim 1 , further comprising a rotatable gantry.

13. The device as claimed in claim 12 , wherein the correction deflection unit is inside a beam tube of the rotatable gantry.

14. A method for deflecting a beam of electrically charged particles onto a curved particle path, the method comprising:

deflecting the beam onto a curved particle path using at least one beam guidance magnet having a coil system which has coils that are curved along the particle path,

variably deflecting the beam in a y,z plane at right angles to the particle path using at least one scanner magnet having a coil system, and

an additional deflection of the beam is effected as a function of the position of the particle path in the y,z plane by regulating or controlling at least one correction system as a function of the position of the particle path in the y,z plan using an additional deflection of the beam,

wherein the at least one correction system includes a correction regulating unit or control unit and a correction deflection unit.

15. The method as claimed in claim 14 , wherein the correction regulating or control unit regulates or controls capacitors and/or correction coils which are disposed in the correction deflection unit.

16. The method as claimed in claim 15 , wherein the correction deflection unit is regulated or controlled via current and/or voltage.

17. The method as claimed in claim 16 , wherein correction coils are driven in pairs individually or jointly and/or correction capacitors are driven individually or jointly for a y deflection and/or z deflection in the y,z plane.

18. The method as claimed in claim 14 , wherein the correction deflection unit is controlled independently of the control of the beam guidance magnets.

19. The method as claimed in claim 14 , wherein the correction deflection unit is controlled for a deflection direction in the y,z plane, and the at least one beam guidance magnet regulates or controls the correction of the deflection in a deflection direction at right angles to the deflection direction in the y,z plane.

20. The method as claimed in claim 14 , wherein the control of the scanner magnets compensates for the deviation of the points of intersection of the particle path with the y,z plane from desired reference positions, brought about by the correction deflection unit.

21. The method as claimed in claim 14 , wherein a current of the at least one beam guidance magnet is set to a mean value of a correction current required for a scan row, and the correction is effected by controlling or regulating the correction deflection unit as a function of the position of the particle path in the y,z plane.

22. The method as claimed in claim 14 , wherein the beam guidance magnet is controlled or regulated as a function of the interaction between correction deflection unit and beam guidance magnet and of the control or regulation of the correction deflection unit.

23. The method as claimed in claim 14 , wherein the beam guidance magnet is controlled via an additional controlled voltage source as a function of the control or regulation of the correction deflection unit.