Granted Patent B2

US 7,971,480 · App. 12/250,205 · Granted Jul 5, 2011

Abstract

Claims (39)

1. A mass flow controller thermal sensor comprising:

a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, wherein,

the upstream tube portion comprises an upstream portion length,

the downstream tube portion comprises a downstream portion length, the downstream portion length is substantially equal to the upstream portion length and the downstream tube portion is substantially parallel to the upstream tube portion,

a first pair of thermal sensing elements coupled to the upstream tube portion, the first pair of thermal sensing elements including a first upstream element and a first downstream element;

a second pair of thermal sensing elements coupled to the downstream tube portion, the second pair of thermal sensing elements including a second upstream element and a second downstream element the second pair of sensing elements generally opposing the first pair of sensing elements;

a thermally conductive element coupled to the capillary tube at a location between the first downstream element and the second upstream element, and the thermally conductive component is disposed to thermally couple the capillary tube to an ambient temperature; and

the first and second pairs of thermal sensing elements being coupled to form a bridge that includes a top node, a right node, a bottom node, and a left node, and the first upstream element is coupled between the left and bottom nodes, the first downstream element is coupled between the left and top nodes, the second upstream element is coupled between the top and right nodes, and the second downstream element is coupled between the right and bottom nodes.

2. The mass flow controller thermal sensor of claim 1 wherein,

the upstream tube portion is (i) coupled to a first end of the tube bend portion, and (ii) adapted to receive a gas flow in a first direction; and

the downstream tube portion is (i) coupled to a second end of the tube bend portion and (ii) adapted to receive a gas flow in a second direction, the second direction generally opposing the first direction; and

the capillary tube generally comprises a U shape.

3. The mass flow controller thermal sensor of claim 1 wherein,

the upstream tube portion further comprises an inlet section and an upstream tube portion main section;

the downstream tube portion further comprises an outlet section and a downstream tube portion main section;

the tube bend portion, the inlet section and the outlet section are thermally coupled to the ambient temperature so as to render temperatures of the tube bend portion, the inlet section and the outlet section substantially the same.

4. The mass flow controller thermal sensor of claim 1 further comprising,

a first heater, the first heater being coupled to the upstream tube portion between the first pair of sensing elements; and

a second heater, the second heater coupled to the downstream tube portion between the second pair of sensing elements and generally opposing the first heater.

5. The mass flow controller thermal sensor of claim 1 further comprising, a differential amplifier, wherein the differential amplifier is coupled to the left and right, and the differential amplifier is configured to output a differential amplifier signal, the differential amplifier signal comprising a voltage generally proportional to a flow rate of fluid flowing through the capillary tube.

6. The mass flow controller thermal sensor of claim 5 wherein, the differential amplifier signal output by the differential amplifier is substantially unaffected by an orthogonal and longitudinal temperature gradients across the sensing elements.

7. A method of operating a mass flow controller comprising,

receiving a flow of fluid in a first direction across at least a first pair of thermal sensing elements including a first upstream element and a first downstream element, the first downstream element being downstream from the first upstream element;

receiving a flow of fluid in a second direction across at least a second pair of thermal sensing elements including a second upstream element and a second downstream element, the second downstream element being downstream from the second upstream element;

thermally coupling the fluid at a location between the first downstream element and the second upstream element to an ambient environment; and

subtracting a sum of signals from the first upstream and the second upstream elements from the sum of signals from the first downstream and the second downstream elements to generate a mass flow rate signal, the mass flow rate signal being substantially unaffected by longitudinal and orthogonal thermal gradients.

8. A mass flow controller comprising,

a main flow line;

a thermal sensor including,

a capillary tube having a u-shaped cross-section, the capillary tube comprising an upstream tube portion coupled to the main flow line and a substantially parallel downstream tube portion coupled to the main flow line, wherein, the downstream tube portion is situated a first distance from the upstream tube portion, the first distance enabling a laminar flow of fluid through the capillary tube and main flow line,

a first pair of sensing elements coupled to the upstream tube portion, the first pair of sensing elements including a first upstream element and a first downstream element;

a second pair of sensing elements coupled to the downstream tube portion, the second pair of sensing elements including a second upstream element and a second downstream element;

a thermally conductive element disposed to set a temperature of at least a portion of the mass flow controller capillary tube between the first downstream element and the second upstream element about equal to an ambient temperature; and

processing means for generating an output signal by subtracting a sum of signals from the first upstream element and the second upstream element from a sum of signals from the first downstream and the second downstream elements.

9. The mass flow controller of claim 8 wherein, the first and second pairs of sensing elements include a thermopile sensor.

10. The mass flow controller of claim 8 wherein, the first distance further enables the output signal to be unaffected by a longitudinal temperature gradient.

11. The mass flow controller of claim 8 further including:

a first heater coupled to the upstream tube portion between the first upstream element and the first downstream element; and

a second heater coupled to the downstream tube portion between the second upstream element and the second downstream element.

Assignments (8)