Method for forming optical coating and optical element having such coating
View Patent ↗A method for forming an optical coating comprising the steps of forming a fine-structure layer mainly composed of an inorganic metal oxide on the surface of an optical member, and then forming an inorganic, hard layer by a liquid-phase deposition method.
1. A method for forming an optical coating comprising the steps of forming a fine-structure layer mainly composed of an inorganic metal oxide on the surface of an optical member, and then forming an inorganic, hard layer by a liquid-phase deposition method, wherein the liquid-phase deposition method comprises adding a boron compound to an aqueous solution of a metal fluoride complex to deposit the metal oxide, and wherein said liquid-phase deposition method uses a basic catalyst.
2. The method for forming an optical coating according to claim 1 , wherein said fine-structure layer is formed by a sol-gel method.
3. The method for forming an optical coating according to claim 1 , wherein said fine-structure layer is a porous layer or a layer having fine roughness.
4. The method for forming an optical coating according to claim 1 , wherein said fine-structure layer is mainly composed of silicon oxide or aluminum oxide.
5. The method for forming an optical coating according to claim 1 , wherein the formed fine-structure layer is fired at 150° C. or lower.
6. The method for forming an optical coating according to claim 1 , wherein said fine-structure layer has a physical thickness of 15-500 nm.
7. The method for forming an optical coating according to claim 1 , wherein said inorganic, hard layer is mainly composed of silicon oxide.
8. The method for forming an optical coating according to claim 1 , wherein said metal fluoride complex comprises ammonium silicon fluoride and/or ammonium zirconium fluoride.
9. The method for forming an optical coating according to claim 1 , wherein said basic catalyst is ammonia water.
10. The method for forming an optical coating according to claim 1 , wherein said optical coating is an anti-reflection coating.
11. The method for forming an optical coating according to claim 1 , wherein said optical coating is formed on an objective lens in a light pickup device, a spectacle lens, an optical lens for an endoscope, or an optical lens for a imaging device.
12. The method for forming an optical coating according to claim 1 , wherein said optical member is made of a resin.