Pressure sensor with nonlinear characteristic curve
View Patent ↗A pressure sensor adapted to provide a high resolution at a low pressure and a high pressure of an operating range is provided. The pressure sensor includes a body having an interface sur ace, a membrane sealingly disposed in the cavity adjacent the interface surface, and a sensing element in communication with the membrane. A fuel cell system including the pressure sensor is also provided.
1. A pressure sensor, comprising:
a main body having an interface surface, the interface surface forming a portion of a cavity formed in the body;
a membrane sealingly disposed in the cavity adjacent the interface surface, wherein a pressure of a fluid in communication with a first side of the membrane causes a deflection of the membrane, and wherein the deflection of the membrane causes a second side thereof to contact the interface surface; and
a sensing element adapted to measure the deflection of the membrane and transmit a signal representing the deflection of the membrane.
2. The pressure sensor of claim 1 , wherein the membrane is substantially disk shaped.
3. The pressure sensor of claim 1 , wherein the interface surface includes one of a convex portion, a concave portion, and a conical portion.
4. The pressure sensor of claim 3 , wherein the interface surface includes at least one convex portion and at least one concave portion.
5. The pressure sensor of claim 3 , wherein an inner peripheral edge of the interface surface defines a first aperture in the body.
6. The pressure sensor of claim 1 , wherein the sensing element is one of a strain gauge, a piezoresistive element, a variable capacitance element, an optical sensor, a variable inductance element, a magnetic element, and an interferometer.
7. The pressure sensor of claim 1 , wherein the membrane includes a first thickness at a center of the membrane and a second thickness at a peripheral edge of the membrane, the first thickness greater than the second thickness.
8. The pressure sensor of claim 1 , wherein the body includes a fastening means disposed thereon.
9. The pressure sensor of claim 1 , wherein the pressure sensor is one of an absolute pressure sensor and a gauge pressure sensor.
10. The pressure sensor of claim 1 , wherein the pressure of the fluid in communication with the membrane is between about 5 bar and 900 bar.
11. The pressure sensor of claim 1 , wherein the sensing element has a first sensor resolution of about 1 bar from about 5 bar to about 25 bar and a second sensor resolution of about 10 bar from about 500 bar to about 900 bar.
12. The pressure sensor of claim 1 , wherein the sensing element is disposed in a second aperture formed in the body.
13. The pressure sensor of claim 1 , wherein the membrane is formed from one of a silicon based material, a metal, a ceramic, and a glass.
14. The pressure sensor of claim 1 , wherein the signal representing the deflection of the membrane is one of a monotonic increasing function and a monotonic decreasing function.
15. A pressure sensor, comprising:
a main body having an interface surface including one of a convex portion, a concave portion, and a conical portion, the interface surface forming a portion of a cavity formed in the body;
a substantially disk shaped membrane sealingly disposed in the cavity adjacent the interface surface, wherein a pressure of a fluid in communication with a first side of the membrane causes a deflection of the membrane, wherein the deflection of the membrane causes a second side thereof to contact the interface surface; and
a sensing element adapted to measure the deflection of the membrane and transmit a signal representing the deflection of the membrane.