Method for high volume manufacturing of thin film batteries
View Patent ↗Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.
1. A method of manufacturing thin film batteries comprising:
providing a substrate;
depositing a thin film battery structure comprising a plurality of layers on said substrate, said layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of said deposited layers is unpatterned and has no mask;
depositing a protective coating; and
patterning said layers and said protective coating using one or more maskless physical patterning processes, wherein said patterning forms trenches in said layers.
2. The method of claim 1 , further comprising, after said patterning, filling said trenches with an encapsulating material.
3. The method of claim 2 , further comprising, after said filling, cutting through the filled trenches and said substrate, producing a multiplicity of said thin film batteries.
4. The method of claim 1 , wherein said substrate is electrically conductive.
5. The method of claim 4 , wherein said electrically conductive substrate also functions as a cathode current collector.
6. The method of claim 1 , wherein said protective coating is an anode current collector.
7. The method of claim 1 , wherein each of said one or more maskless physical patterning processes is selected from the group consisting of laser scribing, mechanical sawing, water/solvent knifing, ion beam milling, and photolithography.
8. The method of claim 1 , wherein all of said layers are unpatterned, parallel and co-extensive.
9. The method of claim 1 , further comprising, after said patterning, encapsulating exposed edges of said layers.
10. The method of claim 1 , wherein said patterning cuts through said substrate, producing a multiplicity of said thin film batteries.
11. The method of claim 10 , further comprising, after said patterning, encapsulating exposed edges of said layers.
12. The method of claim 1 , wherein the one or more maskless physical patterning processes includes a laser scribing process.