Granted Patent B2

US 8,334,093 · App. 12/262,572 · Granted Dec 18, 2012

Abstract

Claims (34)

1. A method for providing a PMR pole in a magnetic recording transducer including an intermediate layer, the method comprising:

providing a mask on the intermediate layer, the mask including a line having at least one side;

providing a hard mask layer on the mask, a portion of the hard mask layer residing on the at least one side;

removing at least part of the portion of the hard mask layer residing on the at least one side, at least a portion of the line being exposed;

removing the line, thereby providing an aperture in the hard mask layer corresponding to the line;

forming a trench in the intermediate layer under the aperture, the trench having a bottom and a top wider than the bottom; and

providing a PMR pole, at least a portion of the PMR pole residing in the trench.

2. The method of claim 1 wherein the line includes a photoresist line.

3. The method of claim 2 wherein the step of removing the line further includes:

performing a lift off of the line.

4. The method of claim 1 wherein the step of removing the at least the part of the portion of the hard mask layer further includes

ion milling the magnetic recording transducer at an angle from normal to a surface of the magnetic recording transducer.

5. The method of claim 4 wherein the angle is at least seventy degrees and not more than ninety degrees.

6. The method of claim 5 wherein the angle is at least seventy-seven and not more than eighty three degrees.

7. The method of claim 1 wherein the step of forming the trench further includes:

performing at least one reactive ion etch (RIE) to remove a portion of the intermediate layer.

8. The method of claim 7 further comprising:

providing an RIE etch stop layer under the intermediate layer, a portion of the RIE etch stop layer forming the bottom of the trench.

9. The method of claim 1 further comprising:

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench, the PMR pole residing on the nonmagnetic layer.

10. The method of claim 9 wherein the step of providing the nonmagnetic layer further includes:

providing an aluminum oxide layer using atomic layer deposition; and

providing a seed layer on the aluminum oxide layer.

11. The method of claim 9 wherein the magnetic recording transducer includes an air-bearing surface (ABS) region and a yoke region and wherein the step of providing the trench further includes:

providing the trench having a first width in the ABS region and a second width in the yoke region, the first width being less than the second width.

12. The method of claim 11 wherein the step of providing the nonmagnetic layer further includes:

continuing deposition of the nonmagnetic layer such that an ABS portion of the nonmagnetic layer on the bottom of the trench in the ABS region is thicker than a yoke portion of the nonmagnetic layer on the bottom of the trench in the yoke region.

13. The method of claim 1 further comprising:

providing a bottom antireflective coating (BARC) under the mask; and

transferring the line to the BARC before the step of providing the hard mask layer, a remaining portion of the BARC residing under the line.

14. The method of claim 13 further comprising:

removing the remaining portion of the BARC under the line after the line has been removed.

15. The method of claim 1 wherein the top of the PMR pole has a width not more than two hundred nanometers.

16. The method of claim 15 wherein the width is not more than one hundred nanometers.

Assignments (9)