Diffusion barrier coatings having graded compositions and devices incorporating the same
View Patent ↗A composite article comprises a substrate having at least a substrate surface and a graded-composition coating disposed on a substrate surface. The composition of the coating material varies substantially continuously across its thickness. The coating reduces the transmission rates of oxygen, water vapor, and other chemical species through the substrate such that the composite article can be used effectively as a diffusion barrier to protect chemically sensitive devices or materials. An organic light-emitting device incorporates such a composite article to provide an extended life thereto.
1. A composite article comprising a substrate having at least a substrate surface and a coating disposed on said at least a substrate surface, said coating comprising a coating material, a composition of which varies substantially continuously across a thickness of said coating.
2. The composite article according to claim 1 , wherein said coating material is formed by expanding thermal-plasma chemical-vapor deposition.
3. The composite article according to claim 1 , wherein said coating material is formed by radio-frequency plasma-enhanced chemical-vapor deposition.
4. The composite article according to claim 1 , wherein a transmission rate of oxygen through said substrate coated having said coating deposited thereon is less than about 0.1 cm 3 /(m 2 day), as measured at 25° C. and with a gas containing 21 volume-percent oxygen.
5. The composite article according to claim 1 , wherein a transmission rate of water vapor through said substrate coated having said coating deposited thereon is less than about 1 g/(m 2 day), as measured at 25° C. and with a gas having 100-percent relative humidity.
6. The composite article according to claim 1 further comprising a diffuse region between said substrate and said coating, said diffuse region comprising materials of both said substrate and said coating.
7. A composite article comprising a substrate having at least a substrate surface and a coating disposed on said at least a substrate surface; said coating comprising a coating material, a composition of which varies substantially continuously across a thickness of said coating; said substrate comprising a polymeric material; said coating material comprising a material selected from organic, inorganic, ceramic materials, and combinations thereof; wherein a transmission rate of oxygen through said substrate coated having said coating deposited thereon is less than about 0.1 cm 3 /(m 2 day), as measured at 25° C. and with a gas containing 21 volume-percent oxygen, a transmission rate of water vapor through said substrate coated with said coating is less than about 1 g/(m 2 day), as measured at 25° C. and with a gas having 100-percent relative humidity, and said coating is deposited on said substrate by a method selected from the group consisting of plasma-enhanced chemical-vapor deposition, radio-frequency plasma-enhanced chemical-vapor deposition, expanding thermal-plasma chemical-vapor deposition, sputtering, reactive sputtering, electron-cyclotron-resonance plasma-enhanced chemical-vapor deposition, inductively-coupled plasma-enhanced chemical-vapor deposition, and combinations thereof.
8. The composite article according to claim 1 wherein the composition of said coating material varies across a thickness thereof such that a graph of percent composition of one of the components of the coating verses the depth of the coating has plural peaks.
9. The composite article according to claim 8 wherein said plural peaks are substantially the same height.
10. The composite article of according to claim 8 wherein the plurality of peaks is at least three.
11. The composite article according to claim 10 wherein the height of the peaks changes as a function of depth.
12. The composite article according to claim 7 wherein the composition of said coating material varies across a thickness thereof such that a graph of the percent composition of one of the components of the coating versus the depth of the coating has plural peaks.
13. The composite article according to claim 12 wherein said plural peaks are substantially the same height.
14. The composite article according to claim 12 wherein the plurality of peaks is at least three.
15. The composite article according to claim 14 wherein the height of the peaks changes as a function of depth.