Semiconductor memory device
View Patent ↗In a multiport SRAM memory cell of the present invention, an access transistor of a first port is disposed in a p-type well, and an access transistor of a second port is disposed in a p-type well. The gates of all of transistors disposed in a memory cell extend in the same direction. With the configuration, a semiconductor memory device having a low-power consumption type SRAM memory cell with an increased margin of variations in manufacturing, by which a bit line can be shortened in a multiport SRAM memory cell or an associative memory, can be obtained.
1. A method of forming a semiconductor memory device having a memory cell region in which a statistic memory cell is formed, comprising:
forming a first inverter of a first driver transistor of a first conductive type and a first load transistor of a second conductive type;
forming a second inverter of a second driver transistor of the first conductive type and a second load transistor of the second conductive type,
electrically connecting an output terminal of said first inverter and an input terminal of said second inverter to each other, thereby forming a first storage node,
electrically connecting an output terminal of said second inverter and input terminal of said first inverter to each other, thereby forming a second storage node;
forming a first access transistor of the first conductive type having one conductive end electrically connected to said first storage node, a gate electrically connected to a word line for writing, and the other conductive end electrically connected to a bit line for writing;
forming a second access transistor of the first conductive type having one conductive end electrically connected to said second storage node, a gate electrically connected to the word line for writing, and the other conductive end electrically connected to the bit line for writing;
forming a first transistor of the first conductive type having a gate electrically connected to said first storage node and one conductive end grounded; and
forming a second transistor of the first conductive type having a gate electrically connected to a word line for reading, one conductive end electrically connected to a bit line for reading, and the other conductive end electrically connected to one conductive end of said first transistor; wherein
said first driver transistor, said first access transistor and said second access transistor are formed in a first well region of a second type;
said second driver transistor, said first transistor and said second transistor are formed in a second well region of the second type, and
said first and second load transistors are formed in a first region of a first type which is sandwiched in between said first well region of the second type and said second well region of the second type.
2. The method of forming a semiconductor memory device having a memory cell region in which a statistic memory cell is formed according to claim 1 , further comprising forming a passage line disposed in a same direction on a same layer as said bit lines for writing and reading, and electrically disconnected from an element of said static memory cell.
3. The method of forming a semiconductor memory device having a memory cell region in which a statistic memory cell is formed according to claim 1 , wherein gates of all transistors disposed in said memory cell region extend in a same direction.
4. The method of forming a semiconductor memory device having a memory cell region in which a statistic memory cell is formed according to claim 1 , further comprising electrically connecting a first ground line to the other conductive end of one of said first and second driver transistors and a second ground line to the other conductive end of said second transistor.
5. The method of forming a semiconductor memory device having a memory cell region in which a statistic memory cell is formed according to claim 4 , where said first and second ground lines are separately routed.