IP Library Granted Patent US 8,125,637
Granted Patent B2
US 8,125,637 · App. 12/268,419 · Granted Feb 28, 2012

Optical beam spectrometer with movable lens

Assignee: Intevac, Inc.
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Quick Facts
Patent No.
US 8,125,637
App. No.
12/268,419
Granted
Feb 28, 2012
Kind
B2
Abstract

A spectroscopic system is described that provides at least one of focus of an excitation beam onto a sample, automatic focus of an optical system of the spectroscopic system for collecting a spectroscopic signal, and/or averaging of excitation intensity over a surface area of the sample.

Claims (41)

1. A spectroscopic system comprising:

a light source adapted to provide a beam of illumination;

an optical system comprising an optical element adapted to focus the beam of illumination on a sample and receive a spectroscopy signal from the sample;

an electro-mechanical stage adapted to move the optical element along a spectroscopic axis; and

a controller adapted to (i) receive a plurality of spectroscopic measurements taken with the optical element disposed in different locations along the spectroscopic axis and (ii) control the focus of the beam of illumination via the electro-mechanical stage based upon a comparison of the plurality of spectroscopic measurements; and,

wherein the controller is adapted to sum each of the plurality of the spectroscopic signals along a dispersion axis and compare the sums.

2. A spectroscopic system according to claim 1 wherein the controller is adapted to sum each of the spectroscopic signals along a dispersion axis via a horizontal bin of a detector.

3. A spectroscopic system according to claim 1 wherein the optical element comprises a lens.

4. A spectroscopic system according to claim 1 wherein the spectroscopic system comprises a hand-held spectrometer.

5. A spectroscopic system comprising:

a light source adapted to provide a beam of illumination;

an optical system comprising an optical element adapted to focus the beam of illumination on a sample and receive a spectroscopy signal from the sample;

an electro-mechanical stage adapted to move the optical element along a spectroscopic axis; and

a controller adapted to (i) receive a plurality of spectroscopic measurements taken with the optical element disposed in different locations along the spectroscopic axis and (ii) control the focus of the beam of illumination via the electro-mechanical stage based upon a comparison of the plurality of spectroscopic measurements; and,

wherein the optical element comprises a prism.

6. A spectroscopic system according to claim 5 wherein the prism comprises a wedge prism.

7. A spectroscopic system comprising:

a light source adapted to provide a beam of illumination;

an optical system comprising an optical element adapted to focus the beam of illumination on a sample and receive a spectroscopy signal from the sample;

an electro-mechanical stage adapted to move the optical element along a spectroscopic axis; and

a controller adapted to (i) receive a plurality of spectroscopic measurements taken with the optical element disposed in different locations along the spectroscopic axis and (ii) control the focus of the beam of illumination via the electro-mechanical stage based upon a comparison of the plurality of spectroscopic measurements; and,

wherein the electro-mechanical stage is adapted to move the optical element to raster the beam across the sample.

8. A spectroscopic system comprising:

a light source adapted to provide a beam of illumination;

an optical system comprising an optical element adapted to focus the beam of illumination on a sample and receive a spectroscopy signal from the sample;

an electro-mechanical stage adapted to move the optical element along a spectroscopic axis; and

a controller adapted to (i) receive a plurality of spectroscopic measurements taken with the optical element disposed in different locations along the spectroscopic axis and (ii) control the focus of the beam of illumination via the electro-mechanical stage based upon a comparison of the plurality of spectroscopic measurements; and,

wherein the electro-mechanical stage is adapted to move the optical element to scan the beam across the sample.

9. A spectroscopic system comprising:

a light source adapted to provide a beam of illumination;

an optical system comprising an optical element adapted to receive the beam of illumination along a spectroscopic axis, focus the beam of illumination on a sample and receive a spectroscopy signal from the sample;

an electro-mechanical stage adapted to move the optical element of the optical system; and

a controller adapted to control the electro-mechanical stage to alter a path of the beam of illumination with respect to the spectroscopic axis by moving the optical element with respect to the spectroscopic axis.

10. A spectroscopic system according to claim 9 wherein the optical element comprises a lens.

11. A spectroscopic system according to claim 9 wherein the optical element comprises a prism.

12. A spectroscopic system according to claim 11 wherein the prism comprises a wedge prism.

13. A spectroscopic system according to claim 9 wherein the controller is adapted to control the electro-mechanical stage to scan the focused beam across a surface area of a sample.

14. A spectroscopic system according to claim 9 wherein the controller is adapted to control the electro-mechanical stage to raster the focused beam across a surface area of a sample.

15. A spectroscopic system according to claim 9 wherein the electro-mechanical stage is adapted to move the optical element orthogonally to the illumination beam.

16. A spectroscopic system according to claim 9 wherein the optical element comprises a wedge prism and the electro-mechanical stage is adapted to move the wedge prism with respect to the beam of illumination to change the path of the beam of illumination.

17. A spectroscopic system according to claim 9 wherein the controller is further adapted to average a plurality of spectroscopic signals received in response to moving the illumination beam across a surface of a sample.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Sep 24, 2024
From: FIRST-CITIZENS BANK & TRUST COMPANY
To: SCIAPS, INC.
Reel/Frame 068676/0175 →
RELEASE OF SECURITY INTEREST Recorded Aug 15, 2024
From: FIRST-CITIZENS BANK & TRUST COMPANY
To: SCIAPS, INC.
Reel/Frame 068303/0085 →
SECURITY INTEREST Recorded Mar 15, 2022
From: SCIAPS, INC.
To: SILICON VALLEY BANK
Reel/Frame 059268/0632 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 9, 2013
From: INTEVAC, INC.; INTEVAC PHOTONICS, INC.
To: SCIAPS, INC.
Reel/Frame 030178/0367 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 14, 2012
From: DELTANU, INC.
To: INTEVAC, INC.
Reel/Frame 027700/0680 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 4, 2009
From: CARRON, KEITH; WATSON, MARK; BULLER, SHANE
To: DELTANU, INC.
Reel/Frame 022201/0914 →
Continuity (2)
Provisional Application 60987001 · Nov 9, 2007
Related Publication 20090135417A1 · May 28, 2009