Solar cell metallization using inline electroless plating
View Patent ↗Inline methods for forming a photovoltaic cell electrode structure, wherein the photovoltaic cell includes a semiconductor substrate having a passivation layer thereon, includes providing a plurality of contact openings through the passivation layer to the semiconductor substrate, selectively plating a contact metal into the plurality of contact openings by printing electroless plating solution into the plurality of contact openings to deposit the contact metal, depositing a metal containing material on the deposited contact metal, and firing the deposited contact metal and the deposited metal containing material. The metal containing material may include a paste containing a silver or silver alloy along with a glass frit and is substantially free to completely free of lead. The methods may also use light activation of the passivation layer or use seed layers to assist in the plating.
1. A method for forming a photovoltaic cell electrode structure, wherein the photovoltaic cell electrode structure comprises a semiconductor substrate having a passivation layer thereon, the method comprising:
providing a plurality of contact openings through the passivation layer to the semiconductor substrate;
selectively plating a contact metal into the plurality of contact openings to deposit the contact metal by printing electroless plating solution directly into the plurality of contact openings;
depositing at least one metal containing layer over the deposited contact metal to form metal gridlines; and
firing the deposited contact metal and the at least one deposited metal containing layer,
wherein all of said providing, said selectively plating, said depositing and said firing are performed while said semiconductor substrate remains disposed on a conveyor belt, and
wherein the method further comprises
depositing a light sensitive seed layer on the passivation layer prior to forming the plurality of contact openings in the passivation layer, and
light activating the light sensitive seed layer in portions on and surrounding one or more of the plurality of contact openings, wherein
the selective plating of the contact metal deposits the contact metal at light activated portions of the light sensitive seed layer and in the plurality of contact openings.
2. The method according to claim 1 , wherein the printing is done with an inkjet printer.
3. The method according to claim 1 , wherein the plurality of contact openings are formed by laser ablation of the passivation layer.
4. The method according to claim 1 , wherein the plurality of contact openings are formed by chemical etching.
5. The method according to claim 1 , wherein the contact metal comprises one or more of nickel, cobalt, titanium, tantalum, tungsten, molybdenum, and palladium.
6. The method according to claim 1 , wherein the at least one metal containing layer comprises a paste containing a silver or silver alloy.
7. The method according to claim 6 , wherein the paste further comprises a glass frit and is at least substantially free of lead or lead oxide.
8. The method according to claim 1 , wherein the method further comprises forming a buffer layer over the deposited contact metal prior to depositing the at least one metal containing layer.
9. The method according to claim 1 , wherein the depositing the at least one metal containing layer over the deposited contact metal comprises screen printing, extrusion, pad printing, jet printing or dispensing a metal containing paste over the deposited contact metal layer.
10. The method according to claim 1 , wherein the depositing the at least one metal containing layer over the deposited contact metal comprises electroless plating, electroplating, or light induced plating one or more metal containing layers over the deposited contact metal layer.
11. The method according to claim 1 , wherein the firing is conducted at about 200° C. to about 1000° C.
12. The method according to claim 1 , wherein the method further comprises
light activating portions of a surface of the passivation layer surrounding one or more of the plurality of contact openings, and
the selective plating of the contact metal into the plurality of contact openings also deposits the contact metal onto the light activated portions of the passivation layer.
13. The method according to claim 12 , wherein
the light activating portions comprises application of a laser to the passivation layer surface, and
the light activating laser has an energy density to activate the surface but not to destroy the passivation layer.
14. The method according to claim 1 , wherein the light sensitive seed layer comprises an organometallic material.
15. The method according to claim 1 , wherein the method further comprises
depositing a self-assembled monolayer material on the passivation layer following forming the plurality of contact openings in the passivation layer at portions on and surrounding one or more of the plurality of contact openings, and
the selective plating of the contact metal deposits the contact metal on the self-assembled monolayer and in the plurality of contact openings.
16. The method according to claim 1 , wherein the process further comprises
depositing a further metal containing material on the deposited metal containing layer, the further metal containing material having a conductivity greater than a conductivity of the deposited metal containing layer, and
the firing fires the deposited contact metal, the deposited metal containing material, and the further deposited metal containing layer.
17. The method according to claim 1 , wherein the semiconductor substrate comprises a silicon wafer and the passivation layer comprises silicon nitride.