MEMS deployment flexures
View Patent ↗A flexure assembly can have a stage that is deployed to a desired position by attachment of the flexure assembly to a housing. For example, a frame can be configured to be held in position by one portion of the housing and a deployment pad can be configured to be held in position by another portion of the housing. A deployment flexure can be configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another. The deployment flexure and a motion control flexure can facilitate movement of the stage with respect to the housing. In this manner, the position of the stage and the preload of the stage are determined by the housing.
1. A device comprising:
a stage;
at least one deployment flexure attached to the stage, wherein the deployment flexure is adapted to engage a housing to move the stage from an undeployed position to a deployed position;
a frame;
at least one motion control flexure;
a deployment pad farmed upon the deployment flexure; and
wherein the at least one deployment flexure interconnects the stage and the deployment pad and the at least one motion control flexure interconnects the frame and the stage.
2. The device as recited in claim 1 , wherein the at least one deployment flexure is a MEMS flexure.
3. The device as recited in claim 1 , wherein the at least one deployment flexure is configured to be deformed by structures of the housing.
4. The device as recited in claim 1 , wherein the at least one deployment flexure is generally planar in configuration prior to being attached to the housing.
5. The device as recited in claim 1 , wherein the at least one deployment flexure is configured to be deformed by structures of the housing in a manner that moves the stage out-of-plane.
6. A device comprising:
a stage;
at least one deployment flexure attached to the stage, wherein the at least one deployment flexure is adapted to engage a housing to move the stage from an undeployed position to a deployed position;
a frame configured to be positioned by a portion of the housing;
a deployment pad configured to be positioned by another portion of the housing;
at least one motion control flexure;
wherein the at least one deployment flexure is configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another; and
wherein the at least one deployment flexure and the at least one motion control flexure facilitate movement of the stage with respect to the housing.
7. The device as recited in claim 1 , wherein the at least one deployment flexure is comparatively soft in one degree of freedom.
8. The device as recited in claim 1 , wherein the at least one deployment flexure is comparatively soft in a plurality of degrees of freedom.
9. The device as recited in claim 1 , wherein the at least one deployment flexure is formed from silicon.
10. The device as recited in claim 1 , wherein the at least one motion control flexure is comparatively soft in a plurality of degrees of freedom.
11. The device as recited in claim 1 , wherein the at least one motion control flexure is formed from silicon.
12. A MEMS device comprising:
a frame;
a stage;
a deployment flexure attached to the stage;
a deployment pad formed upon the deployment flexure;
at least one motion control flexure; and
wherein the at least one deployment flexure interconnects the stage and the deployment pad and the at least one motion control flexure interconnects the frame and the stage.
13. The MEMS device as recited in claim 12 , wherein the deployment flexure is adapted to engage a housing to move the stage from an undeployed position to a deployed position.
14. The MEMS device as recited in claim 12 , wherein the deployment flexure is comparatively soft in one degree of freedom.
15. The MEMS device as recited in claim 12 , wherein the deployment flexure is comparatively soft in a plurality of degrees of freedom.
16. The MEMS device as recited in claim 12 , wherein the deployment flexure is formed from silicon.
17. The MEMS device as recited in claim 12 , wherein the at least one motion control flexure is comparatively soft in a plurality of degrees of freedom.
18. The MEMS device as recited in claim 12 , wherein the at least one motion control flexure is formed from silicon.