Ultrasonic probe, ultrasonic diagnosis apparatus, and ultrasonic probe manufacturing method
View Patent ↗A plurality of piezoelectric elements are arrayed two-dimensionally. A plurality of electrodes are respectively formed on the plurality of piezoelectric elements. A plurality of non-conductive members have columnar shape and are arranged on the plurality of electrodes. A plurality of internal metal layers are respectively provided for the plurality of non-conductive members. The internal metal layers reach from arrangement surfaces of the non-conductive members to other surfaces of the non-conductive members. The arrangement surfaces are opposite to the other surfaces.
1. An ultrasonic probe comprising:
a plurality of piezoelectric elements arrayed two-dimensionally;
a plurality of electrodes respectively formed on the plurality of piezoelectric elements;
a plurality of columnar non-conductive members arranged on the plurality of electrodes; and
a plurality of first conductive layers respectively provided for the plurality of non-conductive members, the first conductive layers reaching from arrangement surfaces of the non-conductive members to other surfaces of the non-conductive members, the arrangement surfaces being opposite to the other surfaces.
2. The probe according to claim 1 , wherein
the non-conductive member comprises a first non-conductive member piece and a second non-conductive member piece, and
the first conductive layer is sandwiched between the first non-conductive member piece and the second non-conductive member piece.
3. The probe according to claim 1 , wherein second conductive layers are formed on the arrangement surfaces and the other surfaces.
4. The probe according to claim 1 , wherein the first conductive layers are substantially perpendicular to the electrodes.
5. The probe according to claim 1 , wherein the first conductive layers are parallel to each other.
6. The probe according to claim 5 , wherein
the arrangement surfaces are defined by a first direction and a second direction, the first direction and the second direction are substantially perpendicular to each other,
the non-conductive members are arrayed along the first direction and the second direction,
the first conductive layers are formed to be substantially perpendicular to one of the first direction and the second direction, and
an interval between the first conductive layers is substantially not more than a center-to-center interval between the non-conductive members along the first direction or the second direction.
7. The probe according to claim 5 , wherein
the arrangement surfaces are defined by a first direction and a second direction, the first direction and the second direction are substantially perpendicular to each other,
the non-conductive members are arrayed along the first direction and the second direction,
the first conductive layers are formed to be substantially perpendicular to one of the first direction and the second direction, and
an interval between the first conductive layers includes a first interval smaller than a center-to-center interval between the non-conductive members along the first direction or the second direction and a second interval having a length substantially twice the first interval.
8. The probe according to claim 5 , wherein
the arrangement surfaces are defined by a first direction and a second direction, the first direction and the second direction are substantially perpendicular to each other,
the non-conductive members are arrayed along the first direction and the second direction,
the first conductive layers are formed obliquely to one of the first direction and the second direction, and
an interval between the conductive layers is smaller than a diagonal line of the arrangement surface.
9. The probe according to claim 1 , wherein
the first conductive layer includes a first layer of the first conductive layer and a second layer of the first conductive layer, and
the first layer is bonded to the second layer with a resin adhesive.
10. The probe according to claim 1 , wherein
the first conductive layer includes a first layer of the first conductive layer of and a second layer of the first conductive layer, and
the first layer is metal-welded to the second layer.
11. The probe according to claim 1 , wherein the first conductive layer contains at least one material selected from the group consisting of nickel, chromium, copper, tin, silver, and gold.
12. The probe according to claim 3 , wherein the second conductive layer contains at least one material selected from the group consisting of nickel, chromium, copper, tin, silver, and gold.
13. The probe according to claim 1 , wherein the non-conductive member contains an inorganic substance having an acoustic impedance of 9 to 15 Mrayl.
14. The probe according to claim 1 , wherein the non-conductive member comprises a ceramic material containing mica.
15. An ultrasonic diagnosis apparatus configured to scans a subject with an ultrasonic wave via an ultrasonic probe, the ultrasonic probe comprising
a plurality of piezoelectric elements arrayed two-dimensionally,
a plurality of electrodes respectively formed on the plurality of piezoelectric elements,
a plurality of columnar non-conductive members arranged on the plurality of electrodes, and
a plurality of conductive layers respectively formed on the plurality of non-conductive members, the conductive layers reaching from arrangement surfaces of the non-conductive members to other surfaces of the non-conductive members, the arrangement surfaces being opposite to the other surfaces.
16. The apparatus according to claim 15 , which further comprises a flexible printed circuit board having plurality of interconnections for electrically extracting the plurality of electrodes, and in which
the plurality of electrodes are connected to at least one of a transmission circuit which transmits a driving signal to the ultrasonic probe, a reception circuit which receives an echo signal from the ultrasonic probe, and a ground level via the flexible printed circuit board.
17. The apparatus according to claim 16 , wherein the flexible printed circuit board is connected to a plurality of conductive members joined to one set of the plurality of non-conductive members and the other surfaces of the plurality of non-conductive members.
18. An ultrasonic probe comprising:
a plurality of transducers having a plurality of piezoelectric elements arrayed two-dimensionally and a plurality of electrodes formed on the plurality of piezoelectric elements; and
an acoustic matching layer provided on the plurality of transducers, the acoustic matching layer having a plurality of non-conductive members arrayed two-dimensionally and a plurality of conductive layers for electrically extracting the plurality of electrodes to surfaces of the non-conductive members opposite the piezoelectric elements.