Method of manufacturing transistor and method of manufacturing organic electroluminescence display using the same
View Patent ↗A method of manufacturing a transistor and a method of manufacturing an organic electroluminescence display are disclosed. When an amorphous silicon layer is crystallized, a silicon oxide layer formed on a polysilicon layer is subsequently patterned. Impurity ions are implanted into first and second regions of the amorphous silicon layer to form first and second doped regions. The silicon oxide layer is patterned so that the silicon oxide layer may be removed from an ohmic contact region of the polysilicon layer, and covers only a channel region of the polysilicon layer.
1. A method of manufacturing a transistor, the method comprising:
forming a gate electrode on a substrate;
forming a gate insulating layer on the substrate having the gate electrode;
forming an amorphous silicon layer on the gate insulating layer;
implanting impurity ions into a first region and a second region of the amorphous silicon layer to form a first doped region and a second doped region in the amorphous silicon layer;
patterning the amorphous silicon layer having the first doped region and the second doped region, the patterned amorphous silicon layer further comprising an undoped region positioned at an edge portion thereof;
while crystallizing the patterned amorphous silicon layer to form a polysilicon layer, forming a silicon oxide layer pattern covering a channel region of the polysilicon layer, the channel region being disposed between the first doped region and the second doped region; and
forming a source electrode directly connected to the first doped region and the undoped region of the polysilicon layer and a drain electrode directly connected to the second doped region and the undoped region of the polysilicon layer.
2. The method of claim 1 , wherein forming the silicon oxide layer pattern comprises patterning a silicon oxide layer, the silicon oxide layer being formed on the polysilicon layer during crystallization of the amorphous silicon layer.
3. The method of claim 2 , wherein patterning the silicon oxide layer comprises:
forming a photoresist pattern on the silicon oxide layer at a position corresponding to the channel region; and
removing the silicon oxide layer on the first doped region and the second doped region by performing a photolithography process using the photoresist pattern as a mask.
4. The method of claim 2 , wherein crystallizing the amorphous silicon layer comprises a field enhanced rapid thermal annealing (FERTA) process.
5. The method of claim 4 , wherein the silicon oxide layer pattern has a thickness of 10 Å to 100 Å.
6. The method of claim 1 , wherein the silicon oxide layer pattern is not disposed on the first doped region and the second doped region.