Electrochemical element, and method and apparatus for manufacturing electrode thereof

1. A method for manufacturing an electrode of an electrochemical element, the electrode being capable of electrochemically absorbing and releasing a lithium ion, the method comprising steps of:

(A) forming an active material layer on a current collector by heating a material that serves as a supply source of the active material layer in a pressure-reduced atmosphere and introducing gas that reacts with the material, thereby depositing a reaction product between the material and the gas on the current collector; and

(B) providing lithium to the active material layer while preventing the gas from reacting with the lithium, wherein:

the step (A) and the step (B) are carried out in a continuous pressure-reduced space,

the step (A) is performed in a first vacuum chamber and the step (B) is performed in a second vacuum chamber,

the first vacuum chamber and the second vacuum chamber are connected with a passage for suppressing movement of the gas from the first vacuum chamber to the second vacuum chamber, and

the continuous pressure-reduced space is depressurized only from the first vacuum chamber to suppress movement of the gas from the first vacuum chamber to the second vacuum chamber.

2. The method for manufacturing an electrode of an electrochemical element according to claim 1 , wherein in the step (B), a source material of lithium is heated, melted and vaporized by a heater, thereby providing lithium to the active material layer.

3. The method for manufacturing an electrode of an electrochemical element according to claim 1 , wherein:

a precursor of the electrode is formed in the first vacuum chamber by performing the step (A),

the precursor is carried to the second vacuum chamber through the passage, and

the second vacuum chamber is depressurized via the passage.