Method for producing rare earth metal-based permanent magnet
View Patent ↗An objective of the present invention is to provide a method for producing a rare earth metal-based permanent magnet having an Al film containing Mg, which exhibits an excellent salt water resistance. The present invention, which is to accomplish the objective, is a method for producing a rare earth metal-based permanent magnet having formed on the surface thereof an Al film containing Mg by a vapor deposition, characterized in that the production method comprises, in the case of cooling the magnet from a high temperature of 160° C. or higher after the completion of the vapor deposition step inside the treating chamber of a deposition apparatus, rapidly cooling down the magnet at a cooling rate of 10° C./min or higher until the temperature of the magnet reaches at least 60° C.
1. A method for producing a rare earth metal-based permanent magnet having formed on a surface thereof an Al film containing Mg by a vapor deposition, characterized in that the production method comprises:
cooling the rare earth metal-based permanent magnet from a high temperature of 160° C. or higher at a cooling rate of 10° C./min or higher until the temperature of the magnet reaches 60° C. or lower after a completion of a vapor deposition of an Al film containing Mg inside a treating chamber of a deposition apparatus,
wherein a textural structure of the Al film containing Mg comprises a main phase containing Al as the major component and Mg, and an Mg concentration phase containing Al and Mg, in which the Mg concentration is higher than the Mg concentration of the main phase,
wherein the main phase is a crystalline phase with an average crystallite size in a range of 100 nm to 2 μm, and the Mg concentration phase is constituted by an aggregate texture comprising amorphous and/or fine crystals having an average crystallite size of 20 nm or smaller,
wherein the Mg concentration phase is distributed along a thickness direction of the film from the interface with the magnet to a surface of the film,
wherein a width of the Mg concentration phase is in a range of 10 nm to 500 nm,
wherein the main phase contains 95 mass % or higher of Al, and the Mg concentration phase contains 10 mass % to 25 mass % of Mg,
wherein the main phase contains 0.01 mass % to 5 mass % of Mg, and
wherein a heating temperature of a melting/evaporation source and a feed rate of an Al wire containing Mg to the melting/evaporation source are set such that a temperature of the rare earth metal-based permanent magnet at a vapor deposition step is at most 255° C.
2. The production method as claimed in claim 1 , wherein the magnet is held for at least 5 minutes at 160° C. or higher prior to the cooling operation.
3. The production method as claimed in claim 1 , wherein the cooling is effected by introducing gaseous nitrogen inside the treating chamber.
4. The production method as claimed in claim 1 , wherein the cooling is effected by allowing the magnet to stand in ambient atmosphere.
5. The production method as claimed in claim 1 , wherein the vapor deposition comprises using an Al wire containing 3 mass % to 10 mass % of Mg as a vapor deposition material.