Inertial force sensor
View Patent ↗An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming.
1. An inertial force sensor comprising an oscillator, the oscillator having:
a plurality of arms made of a non-piezoelectric material;
a base linking the arms; and
an electrode formed on a side of each of the plurality of arms,
wherein a trimmed portion is formed at a portion away from a ridge portion of the arm of the plurality of arms,
wherein the trimmed portion is formed between 5% and 95% width of a plane part of the arm, and
wherein the plain part lacks an electrode.
2. The inertial force sensor of claim 1 ,
wherein mass of all the arms is equal each other.
3. The inertial force sensor of claim 1 ,
wherein the trimmed portion is formed by a laser processing.
4. The inertial force sensor of claim 3 ,
wherein a wavelength of the laser is at most 355 nm.
5. The inertial force sensor of claim 1 ,
wherein the trimmed portion is formed in parallel with a ridge portion of the arm.
6. The inertial force sensor of claim 1 ,
wherein the non-piezoelectric material is made of one of silicon, surface oxide silicon, diamond, melted quartz, alumina and GaAs.
7. The inertial force sensor of claim 1 ,
wherein the trimmed portion is one of plural trimmed portions, each of the trimmed portions is formed in respective one of the arms on a same side with respect to each center line in a width direction of each of the arms.
8. The inertial force sensor of claim 7 ,
wherein the trimmed portions have same length and same width, and each of the trimmed portions is formed at a position with respect to each center line in a width direction of each of the arms, where mass of the arms is balanced.
9. The inertial force sensor of claim 1 ,
wherein the trimmed portion is one of plural trimmed portions, the trimmed portions have same length and same width, and each of the trimmed portions is formed in respective one of the arms at a position with respect to each center line in a width direction of each of the arms, where mass of the arms is balanced.