Light-emitting display with auxiliary wiring section and method of manufacturing the same
View Patent ↗A light-emitting display capable of maintaining low power consumption and improving display quality irrespective of the configuration of an auxiliary wiring is provided. A second electrode 20 and an auxiliary wiring 18 B are electrically connected to each other through a conductive contact section 15 B. Moreover, only a part of the auxiliary wiring 18 B is connected to the contact section 15 B. Even if the surface of the auxiliary wiring 18 B is oxidized, an increase in connection resistance is prevented. Moreover, a restriction on layout is not imposed at the time of forming the contact section 15 B.
1. A light-emitting display comprising a plurality of drive elements and a first wiring layer electrically connected to the drive elements, display comprising, when viewed in cross section:
a like plurality of first electrodes respectively corresponding to the drive elements, and positioned over the drive elements and the wiring layer;
a like plurality of light emission sections formed on the first electrodes, respectively;
a common second electrode formed of a material allowing light from the light emission sections to pass therethrough and arranged over the plurality of light emission sections;
an auxiliary wiring layer with a resistance lower than that of the common second electrode; and
a conductive contact layer electrically connecting the common second electrode and the auxiliary wiring layer, a portion of the common second electrode in direct contact with the conductive contact layer, and a portion of the auxiliary wiring layer positioned above and in direct contact with the conductive contact layer.
2. The light-emitting display according to claim 1 , characterized in that the first wiring layer and the conductive contact layer are formed by patterning one conductive layer.
3. The light-emitting display according to claim 2 , characterized in that the common second electrode and the auxiliary wiring layer are partially connected to each other through the conductive contact layer.
4. The light-emitting display according to claim 2 , characterized in that the conductive layer is a multilayer film, the multilayer film including:
a low etching selectivity film in at least an uppermost layer of the multilayer film and made of a material having relatively low etching selectivity with respect to the first electrodes, and
a high etching selectivity film in a layer lower than the low etching selectivity film and made of a material having relatively high etching selectivity with respect to the first electrodes, and
the low etching selectivity film in the conductive contact layer is partially removed.
5. The light-emitting display according to claim 4 , characterized in that:
a planarization insulating layer and an interelectrode insulating layer, each having an aperture in a region corresponding to the conductive contact layer, are between the conductive contact layer and the common second electrode, and
the interelectrode insulating layer is on the planarization insulating layer, and the aperture of the interelectrode insulating layer is inside of the aperture of the planarization insulating layer.
6. The light-emitting display according to claim 2 , characterized in that:
the conductive layer is made of a material with relatively low etching selectivity with respect to the first electrodes, and
an upper layer portion of the conductive contact layer is partially removed.
7. The light-emitting display according to claim 6 , characterized in that:
a planarization insulating layer and an interelectrode insulating layer each having an aperture in a region corresponding to the conductive contact layer are formed between the conductive contact layer and the common second electrode, and
the interelectrode insulating layer is formed on the planarization insulating layer, and the aperture of the interelectrode insulating layer is formed inside of the aperture of the planarization insulating layer.
8. The light-emitting display according to claim 1 , characterized in that:
an insulating layer having an aperture in a region corresponding to the conductive contact layer is between the conductive contact layer and the common second electrode, and
the side surface of the aperture has a step-like shape with a wide top and a narrow bottom.
9. The light-emitting display according to claim 1 , characterized in that the conductive contact layer is made of a material having relatively high etching selectivity with respect to the first electrodes.
10. A method of manufacturing a light-emitting display comprising the steps of:
forming a plurality of drive elements and a first wiring layer on a substrate, and electrically connecting the plurality of drive elements and the wiring layer;
forming a first conductive layer on the drive elements and the wiring layer;
forming a like plurality of first electrodes corresponding to the plurality of drive elements, respectively, as well as an auxiliary wiring layer by patterning the first conductive layer;
forming a respective light emission section on each of the first electrodes;
forming a common second electrode of a material allowing light from each light emission section to pass therethrough on the plurality of the light emission sections; and
forming a conductive contact layer, and electrically connecting the common second electrode and the auxiliary wiring layer through the conductive contact layer,
wherein,
the auxiliary wiring layer is formed of a material with resistance that is lower than that of the common second electrode, and
a portion of the common second electrode is in direct contact with the conductive contact layer, and a portion of the auxiliary wiring layer is positioned above and in direct contact with the conductive contact layer.
11. The method of manufacturing a light-emitting display according to claim 10 , characterized in that one second conductive layer is formed, and the first wiring layer and the conductive contact layer are formed by patterning the second conductive layer.
12. The method of manufacturing a light-emitting display according to claim 11 , characterized in that the step of electrically connecting the common second electrode and the auxiliary wiring layer includes partially connecting the common second electrode and the auxiliary wiring layer to each other through the conductive contact layer.
13. The method of manufacturing a light-emitting display according to claim 11 , characterized in that:
the second conductive layer is made of a multilayer film in which a low etching selectivity film made of a material having relatively low etching selectivity with respect to the first electrodes and is placed in at least an uppermost layer, and
a high etching selectivity film made of a material having relatively high etching selectivity with respect to the first electrodes and is placed in a lower layer than the low etching selectivity film.
14. The method of manufacturing a light-emitting display according to claim 13 , further comprising the steps of:
forming a planarization insulating layer having an aperture in a region corresponding to the conductive contact layer between the conductive contact layer and the common second electrode; and
forming an interelectrode insulating layer having an aperture in a region corresponding to the conductive contact layer between the planarization insulating layer and the common second electrode,
wherein,
the aperture of the interelectrode insulating layer is formed inside of the aperture of the planarization insulating layer.
15. The method of manufacturing a light-emitting display according to claim 11 , characterized in that:
the second conductive layer is formed of a material having relatively low etching selectivity with respect to the first electrodes, and
the thickness of the second conductive layer is such that only an upper layer portion of the conductive contact layer is partially removed at the time of forming the first electrodes by patterning.
16. The method of manufacturing a light-emitting display according to claim 15 , further comprising the steps of:
forming a planarization insulating layer having an aperture in a region corresponding to the conductive contact layer between the conductive contact layer and the common second electrode; and
forming an interelectrode insulating layer having an aperture in a region corresponding to the conductive contact layer between the planarization insulating layer and the common second electrode,
wherein,
the aperture of the interelectrode insulating layer is formed inside of the aperture of the planarization insulating layer.
17. The method of manufacturing a light-emitting display according to claim 10 , further comprising the steps of:
forming an insulating layer between the conductive contact layer and the common second electrode; and
forming an aperture having a step-like side surface with a wide top and a narrow bottom by selectively removing a region corresponding to the conductive contact layer in the insulating layer.
18. The method of manufacturing a light-emitting display according to claim 17 , characterized in that the aperture having a step-like side surface is formed through the use of a halftone mask or a gray tone mask.
19. The method of manufacturing a light-emitting display according to claim 10 , characterized in that the conductive contact layer is formed of a material showing high etching selectivity with respect to the first electrodes.