Method for manufacturing semiconductor epitaxial crystal substrate
The present invention provides a method for manufacturing a gallium nitride semiconductor epitaxial crystal substrate with a dielectric film which has a low gate leak current and negligibly low gate lag, drain lag, and current collapse characteristics. The method for manufacturing a semiconductor epitaxial crystal substrate is a method for manufacturing a semiconductor epitaxial crystal substrate in which a dielectric layer of a nitride dielectric material or an oxide dielectric material in an amorphous form functioning as a passivation film or a gate insulator is provided on a surface of a nitride semiconductor crystal layer grown by metal organic chemical vapor deposition. In the method, after the nitride semiconductor crystal layer is grown in an epitaxial growth chamber, the dielectric layer is grown on the nitride semiconductor crystal layer in the epitaxial growth chamber.
1. A method for manufacturing a semiconductor epitaxial crystal substrate in which a dielectric layer of a nitride dielectric material or an oxide dielectric material in an amorphous form functioning as a passivation film or a gate insulator is provided on a surface of a nitride semiconductor crystal layer grown by metal organic chemical vapor deposition, comprising:
growing the nitride semiconductor crystal layer in an epitaxial growth furnace; and then
growing the dielectric layer on the nitride semiconductor crystal layer in the epitaxial growth furnace.
2. The method for manufacturing a semiconductor epitaxial crystal substance according to claim 1 , wherein the dielectric layer is grown using an organic metal as a metal material, ether or water as an oxygen material, and ammonia as a nitrogen containing material by the metal organic chemical vapor deposition.
3. The method for manufacturing a semiconductor epitaxial crystal substance according to claim 2 , wherein at least a part of the growth of the dielectric layer is performed while ammonia as a group V material is supplied.
4. The method for manufacturing a semiconductor epitaxial crystal substance according to claim 1 , wherein at least using nitrogen as a carrier gas performs a part of the growth of the dielectric layer.
5. The method for manufacturing a semiconductor epitaxial crystal substance according to claim 1 , wherein the dielectric layer contains at least one dielectric material selected from among AlO x , AlO x :N (0.5<x<1.5), SiO 2 , SiO 2 :N, Ga 2 O 3 , Si 3 N 4 , HfO 2 , Hf x Al y O 3 (0<x<1, y=2−½x), Hf x Al y O 3 :N (0<x<1, y=2−½x), GdO, ZrO 2 , MgO, and Ta 2 O 5 .
6. The method for manufacturing a semiconductor epitaxial crystal substance according to claim 1 , wherein the dielectric layer contains at least one dielectric material selected from among Al 2 O 3 , Al 2 O 3 :N, SiO 2 , SiO 2 :N, Ga 2 O 3 , Si 3 N 4 , HfO 2 , Hf x Al y O 3 (0<x<1, y=2−½x), Hf x Al y O 3 :N (0<x<1, y=2−½x), GdO, ZrO 2 , MgO, and Ta 2 O 5 .
7. The method of claim 1 , wherein the semiconductor epitaxial crystal substrate is used for a field effect transistor.
8. The method for manufacturing a semiconductor epitaxial crystal substance according to claim 2 , wherein at least using nitrogen as a carrier gas performs a part of the growth of the dielectric layer.