Varactors including interconnect layers
View Patent ↗In an embodiment of the present invention is provided a varactor comprising a substrate, a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein, a tunable dielectric material positioned on the surface of the substrate and within the gap, the tunable dielectric at least partially overlaying the plurality of electrodes, and a top electrode in contact with the tunable dielectric.
1. A varactor comprising:
a substrate;
a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;
a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of bottom electrodes;
a top electrode in contact with said tunable dielectric and isolated from the substrate, wherein each of the top electrode and plurality of bottom electrodes are isolated from each other; and
an adhesion layer positioned between one or more of the plurality of bottom electrodes and the substrate; or between the one or more of the plurality of bottom electrodes and the tunable dielectric material; or between the tunable dielectric material and the top electrode.
2. The varactor of claim 1 , wherein said top electrode, said tunable dielectric and said plurality of bottom electrodes are encapsulated, and wherein the varactor is symmetrical.
3. The varactor of claim 1 , wherein said top or bottom electrode comprises one of:
gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.
4. The varactor of claim 1 , wherein the tunable dielectric material comprises one of:
barium strontium titanate, barium calcium titanate, lead zirconium titanate, lead lanthanum zirconium titanate, lead titanate, barium calcium zirconium titanate, sodium nitrate, KNbO 3 , LiNbO 3 , LiTaO 3 , PbNb 2 O 6 , PbTa 2 O 6 , KSr(NbO 3 ), NaBa 2 (NbO 3 ) 5 , KH 2 PO 4 , and composites thereof.
5. The varactor of claim 1 , wherein the tunable dielectric material comprises a barium strontium titanate (BSTO) composite selected from the group of: BSTO—MgO, BSTO—MgAl 2 O 4 , BSTO—CaTiO 3 , BSTO—MgTiO 3 , BSTO—MgSrZrTiO 6 , and combinations thereof.
6. The varactor of claim 1 , wherein the substrate comprises one of: MgO, alumina (Al 2 O 3 ), LaAIO 3 , glass, sapphire, quartz, silicon, gallium arsenide and any material classified as low temperature co-fired ceramic (LTCC).
7. The varactor of claim 1 , wherein the top electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide, and wherein the varactor is symmetrical.
8. The varactor of claim 1 , wherein first and second opposing ends of each of the top electrode and the tunable dielectric material are encapsulated.
9. A varactor comprising:
a substrate;
a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;
a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of bottom electrodes;
a top electrode in contact with said tunable dielectric, wherein each of the top electrode and plurality of bottom electrodes are isolated from each other; and
a plurality of interconnects on a surface of said plurality of bottom electrodes enabling a connection to a voltage source.
10. The varactor of claim 9 , wherein said top electrode, said tunable dielectric and said plurality of bottom electrodes are encapsulated, and wherein the top electrode is isolated from the substrate.
11. The varactor of claim 9 , wherein said top or plurality of bottom electrodes comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide, and wherein the varactor is symmetrical.
12. A varactor comprising:
a substrate;
a first electrode positioned on a surface of the substrate;
a second electrode positioned on the surface of the substrate forming a gap between the first and second electrodes, wherein the first and second electrodes are isolated from each other; and
a tunable dielectric material positioned on the surface of the substrate and within the gap, wherein the tunable dielectric material covers only a portion of a top surface of each of the first and second electrodes.
13. The varactor of claim 12 , wherein said tunable dielectric material positioned on the surface of the substrate and within the gap is encapsulated with a dielectric layer, and wherein a plurality of interconnects is positioned on a remainder portion of the top surface of each of the first and second electrodes that is not covered by the tunable dielectric material.
14. The varactor of claim 13 , further comprising a contact within said dielectric layer capable of attaching a voltage source.
15. The varactor of claim 12 , wherein the tunable dielectric layer comprises one of:
barium strontium titanate, barium calcium titanate, lead zirconium titanate, lead lanthanum zirconium titanate, lead titanate, barium calcium zirconium titanate, sodium nitrate, KNbO 3 , LiNbO 3 , LiTaO 3 , PbNb 2 O 6 , PbTa 2 O 6 , KSr(NbO 3 ), NaBa 2 (NbO 3 ) 5 , KH 2 PO 4 , and composites thereof.
16. The varactor of claim 12 , wherein the tunable dielectric layer comprises a barium strontium titanate (BSTO) composite selected from the group of: BSTO—MgO, BSTO—MgAl 2 O 4 , BSTO—CaTiO 3 , BSTO—MgTiO 3 , BSTO—MgSrZrTiO 6 , and combinations thereof.
17. The varactor of claim 12 , wherein the substrate comprises one of: MgO, Alumina (Al 2 O 3 ), LaAlO 3 , glass, sapphire, quartz, silicon, gallium arsenide and any material classified as low temperature co-fired ceramic (LTCC).
18. The varactor of claim 12 , wherein the first or second electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide, and wherein the varactor is symmetrical.