Semiconductor device and method of manufacturing the same
There is provided a semiconductor device which comprises a first interlayer insulating film (first insulating film) formed over a silicon (semiconductor) substrate, a capacitor formed on the first interlayer insulating film and having a lower electrode, a dielectric film, and an upper electrode, a fourth interlayer insulating film (second insulating film) formed over the capacitor and the first interlayer insulating film, and a metal pattern formed on the fourth interlayer insulating film over the capacitor and its periphery to have a stress in an opposite direction to the fourth interlayer insulating film. As a result, characteristics of the capacitor covered with the interlayer insulating film can be improved.
1 . A semiconductor device comprising:
a first insulating film formed over a semiconductor substrate;
a capacitor formed on the first insulating film and having a lower electrode, a dielectric film, and an upper electrode;
a second insulating film formed over the capacitor and the first insulating film;
a metal pattern formed on the second insulating film over the capacitor and a periphery thereof, and having a stress in an opposite direction to a stress of the second insulating film; and
wherein the metal pattern is formed to have a single-layer structure or a multi-layered structure.
2 . A semiconductor device according to claim 1 , wherein the metal pattern is made of any material selected from the group consisting of aluminum, titanium, copper, tantalum, and tungsten, or made of material containing any one selected from the group consisting of aluminum, titanium copper, tantalum, and tungsten.