Combined semiconductor apparatus with thin semiconductor films
View Patent ↗A semiconductor apparatus includes two thin semiconductor films bonded to a substrate, and a thin-film interconnecting line electrically connecting a semiconductor device such as a light-emitting device in the first thin semiconductor film to an integrated circuit in the second thin semiconductor film. Typically, the integrated circuit drives the semiconductor device. The two thin semiconductor films are formed separately from the substrate. The first thin semiconductor film may include an array of semiconductor devices. The first and second thin semiconductor films may be replicated as arrays bonded to the same substrate. Compared with conventional semiconductor apparatus comprising an array chip and a separate driver chip, the invented apparatus is smaller and has a reduced material cost.
1. A method fabricating a semiconductor apparatus, comprising the steps of:
providing an SOI substrate that includes a silicon substrate, a silicon film, and a buried SiO 2 layer that is disposed between the silicon substrate and the silicon film;
fabricating a row of driver circuits on the silicon film, the row of driver circuits having a predetermined length;
detaching the silicon film from the silicon substrate by etching the SiO 2 layer from between the silicon substrate and the silicon film after the row of driver circuits has been fabricated on the silicon film; and
removing the silicon film, including the row of driver circuits, from the silicon substrate;
mounting the silicon film, including the row of driver circuits, on another substrate, the another substrate being made of a material consisting of glass, resin, and ceramic;
mounting a row of LED units on the another substrate adjacent the row of driver circuits and substantially parallel to the row of driver circuits, each LED unit having a plurality of LEDs, each LED unit having a length that is substantially shorter than the length of the row of driver elements; and
electrically connecting each LED to a respective one of the driver elements.