Droplet discharge device
A pattern formation device is for forming a pattern on a substrate includes first and second foreign matter detection sensors. Each of the first and second foreign matter detection sensors includes a light projecting unit and a light receiving unit disposed across a transport path of the substrate from the first light projecting unit. The light projecting unit is configured and arranged to emit a detection light along an upper surface of the substrate. The light receiving unit being configured and arranged to receive the detection light to detect foreign matter on the substrate based on an amount of the detection light received by the light receiving unit. The light projecting units of the first and second foreign matter detection sensors are disposed on opposite sides of the transport path.
1. A droplet discharge device comprising:
a transport table configured and arranged to transport a substrate mounted on the transport table along a transport path;
a droplet discharge head configured and arranged to discharge a functional liquid onto the substrate mounted on the transport table; and
a first foreign matter detection sensor configured and arranged to detect foreign matter on the substrate, the first foreign matter detection sensor having a first light projecting unit and a first light receiving unit,
the first light projecting unit being configured and arranged to emit a first detection light so that an optical axis of the first detection light is sloped toward the substrate, and
the first light receiving unit being disposed across the transport path from the first light projecting unit, and configured and arranged to receive a part of the first detection light emitted directly to the first light receiving unit along an upper surface of the substrate and a part of the first detection light reflected by the upper surface of the substrate,
the first foreign matter detection sensor detecting foreign matter on the substrate based on an amount of the first detection light received by the first light receiving unit.
2. The droplet discharge device according to claim 1 , further comprising
a first substrate detection sensor configured and arranged to detect that the substrate is positioned directly below an optical axis of the first detection light, and
a foreign matter detection sensor control unit configured to control an operation of the first foreign matter detection sensor based on a detection signal from the first substrate detection sensor.
3. The droplet discharge device according to claim 1 , further comprising
a transport table foreign matter detection sensor configured and arranged to detect foreign matter on an upper surface of the transport table.
4. The droplet discharge device according to claim 1 , wherein
an inspection unit configured and arranged to reciprocally move in a main scanning direction along the transport path independent from the transport table directly below the droplet discharge head to inspect conditions of the droplets discharged from the droplet discharge head, and
an inspection unit foreign matter detection sensor configured and arranged to detect foreign matter in the inspection unit.
5. A droplet discharge device comprising:
a transport table configured and arranged to transport a substrate mounted on the transport table along a transport path;
a droplet discharge head configured and arranged to discharge a functional liquid onto the substrate mounted on the transport table;
a first foreign matter detection sensor configured and arranged to detect foreign matter on the substrate, the first foreign matter detection sensor having a first light projecting unit and a first light receiving unit,
the first light projecting unit being configured and arranged to emit a first detection light, and
the first light receiving unit being disposed across the transport path from the first light projecting unit, and configured and arranged to receive a part of the first detection light emitted directly to the first light receiving unit along an upper surface of the substrate and a part of the first detection light reflected by the upper surface of the substrate; and
a second foreign matter detection sensor configured and arranged to detect foreign matter on the substrate, the second foreign matter detection sensor having a second light projecting unit and a second light receiving unit,
the second light projecting unit being configured and arranged to emit a second detection light, and
the second light receiving unit being disposed across the transport path from the second light projecting unit, and configured and arranged to receive a part of the second detection light emitted directly to the second light receiving unit along the upper surface of the substrate and a part of the second detection light reflected by the upper surface of the substrate,
the first foreign matter detection sensor detecting foreign matter on the substrate based on an amount of the first detection light received by the first light receiving unit,
the second foreign matter detection sensor detecting foreign matter on the substrate based on an amount of the second detection light received by the second light receiving unit,
the first light projecting unit and the second light projecting unit being disposed on opposite sides of the transport path.
6. The droplet discharge device according to claim 5 , wherein
the second foreign matter detection sensor is arranged so that an optical axis of the second detection light is sloped toward the substrate.
7. The droplet discharge device according to claim 5 , further comprising
a second substrate detection sensor configured and arranged to detect that the substrate is positioned directly below an optical axis of the second detection light, and
the foreign matter detection sensor control unit being further configured to control an operation of the second foreign matter detection sensor based on a detection signal from the second substrate detection sensor.