Method of manufacturing thin film transistor substrate
View Patent ↗In a method of manufacturing a thin film transistor substrate, a gate line and a gate electrode are formed on a substrate. A gate insulating layer is formed to cover the gate line and the gate electrode. A semiconductor layer is formed on the gate insulating layer to overlap with the gate electrode. A data line, a source electrode, and a drain electrode are formed on the gate insulating layer and the semiconductor layer. A photoresist layer is formed on the data line, the source electrode, and the drain electrode. The photoresist layer is patterned, and an organic layer is formed on the substrate having the photoresist layer pattern. Then, the photoresist layer pattern is removed.
1. A method of manufacturing a thin film transistor substrate, the method comprising:
forming a gate line and a gate electrode on a substrate;
forming a gate insulating layer to cover the gate line and the gate electrode;
forming a semiconductor layer on the gate insulating layer to overlap with the gate electrode;
forming a data line, a source electrode, and a drain electrode on the gate insulating layer and the semiconductor layer;
forming a photoresist layer pattern on the data line, the source electrode, and the drain electrode;
forming an organic layer on the substrate having the photoresist layer pattern; and
removing the photoresist layer pattern.
2. The method of claim 1 , further comprising forming an embossing pattern on an upper surface of the organic layer.
3. The method of claim 2 , wherein the embossing pattern is formed through an imprinting process using a mold.
4. The method of claim 3 , wherein the mold comprises a polymer having elasticity.
5. The method of claim 1 , wherein forming the photoresist layer pattern comprises performing an exposure process and a development process using a mask having a transmitting area and a blocking area.
6. The method of claim 5 , wherein the photoresist layer pattern comprises a negative-type photoresist.
7. The method of claim 1 , further comprising:
performing a surface treatment on the photoresist layer pattern to improve hydrophobic characteristics of an upper surface of the photoresist layer pattern prior to forming the organic layer.
8. The method of claim 7 , wherein the surface treatment is performed through an Hexa Methyl Di Siloxane (HMDS) treatment or a plasma treatment.
9. The method of claim 1 , wherein the organic layer comprises an organic material.
10. The method of claim 9 , wherein the organic material comprises a polymer for an imprinting process.
11. The method of claim 1 , further comprising forming a lower protective layer comprising an inorganic material on the data line, the source electrode, and the drain electrode prior to forming the organic layer.
12. The method of claim 11 , wherein the inorganic material comprises silicon oxide (SiO x ) or silicon nitride (SiN x ).
13. The method of claim 12 , wherein the gate line and the data line defines a pixel area that is divided into a transmissive area and a reflective area, further comprising:
forming a transparent electrode on the organic layer; and
forming a reflective electrode in the reflective area of the transparent electrode.
14. The method of claim 13 , wherein the transparent electrode comprises at least one of indium tin oxide, indium zinc oxide, and tin oxide.
15. The method of claim 13 , wherein the reflective electrode comprises at least one metal component selected from the group consisting of molybdenum (Mo), titanium (Ti), copper (Cu), aluminum (Al), chrome (Cr), a molybdenum alloy, a copper alloy, and an aluminum alloy.
16. The method of claim 13 , wherein the transparent electrode is connected to the drain electrode through a contact hole formed through the organic layer.
17. The method of claim 1 , wherein removing the photoresist layer pattern comprises lifting off the photoresist layer pattern using a strip scheme.
18. The method of claim 17 , wherein removing the photoresist layer pattern further comprises ashing an upper surface of the photoresist layer pattern to remove a remaining layer from the upper surface of the photoresist layer pattern prior to lifting off of the photoresist layer pattern.
19. A method of manufacturing a thin film transistor substrate, the method comprising:
forming a thin film transistor in a reflective area of a substrate that is divided into the reflective area and a transmissive area;
forming a photoresist layer pattern on at least a portion of the transmissive area and on a drain electrode of the thin film transistor;
forming an organic layer on the substrate on which the photoresist layer pattern is formed; and
removing the photoresist layer pattern.
20. The method of claim 19 , further comprising forming an embossing pattern on an upper surface of the organic layer.