Solid-state image pickup device and fabrication method therefor
View Patent ↗Disclosed herein is a solid-state image pickup device, including, a light receiving pixel section, a black level reference pixel section, a multi-layer wiring line section, a first light blocking film, a second light blocking film, a third light blocking film, and a fourth light blocking layer.
1. A solid-state image pickup device, comprising:
a light receiving pixel section formed on a semiconductor substrate;
a black level reference pixel section formed on said semiconductor substrate;
a multi-layer wiring line section formed on said semiconductor substrate including said light receiving pixel section and said black level reference pixel section;
said multi-layer wiring line section including,
an insulating layer formed on said semiconductor substrate; and
a plurality of metal wiring line layers formed in said insulating layer and including first, second, third and fourth metal wiring line layers;
a first light blocking film formed by disposing some of a plurality of first metal wiring lines formed from said first metal wiring line layer in a predetermined spaced relationship from each other and in a plurality of rows above said black level reference pixel section;
a second light blocking film formed by disposing some of a plurality of second metal wiring lines formed from said second metal wiring line layer above said first metal wiring line layer between and above said first metal wiring lines above said black level reference pixel section;
a third light blocking film formed by disposing some of a plurality of third metal wiring lines formed from said third metal wiring line layer above said second metal wiring line layer in a predetermined spaced relationship from each other and in a plurality of rows in a direction perpendicular to said second light blocking film above said black level reference pixel section; and
a fourth light blocking layer formed by disposing some of a plurality of fourth metal wiring lines formed from said fourth metal wiring line layer above said third metal wiring line layer above and between said third metal wiring lines above said black level reference pixel section.
2. The solid-state image pickup device according to claim 1 , wherein said second light blocking film is formed in an overlapping relationship with and above part of said first light blocking film.
3. The solid-state image pickup device according to claim 1 , wherein said fourth light blocking film is formed in an overlapping relationship with and above part of said third light blocking film.
4. The solid-state image pickup device according to claim 1 , wherein at least one of said first to fourth light blocking films is used as a wiring line for use for electric connection.
5. A solid-state image pickup device, comprising:
a light receiving pixel section formed on a semiconductor substrate;
a black level reference pixel section formed on said semiconductor substrate;
a multi-layer wiring line section formed on said semiconductor substrate including said light receiving pixel section and said black level reference pixel section;
said multi-layer wiring line section including,
an insulating layer formed on said semiconductor substrate; and
a plurality of metal wiring line layers formed in said insulating layer and including first and second metal wiring line layers;
a first light blocking film formed by disposing some of a plurality of first metal wiring lines formed from said first metal wiring line layer in a predetermined spaced relationship from each other and in a plurality of rows above said black level reference pixel section; and
a second light blocking film formed by disposing some of a plurality of second metal wiring lines formed from said second metal wiring line layer above said first metal wiring line layer in a region including a region between and above said first metal wiring lines above said black level reference pixel section;
a set of said first and second light blocking films being provided in a plurality of layers above said black level reference pixel section.
6. The solid-state image pickup device according to claim 1 , wherein said first and second light blocking films are formed in a partly overlapping relationship with each other on a layout in plan.
7. The solid-state image pickup device according to claim 1 , wherein at least one of said first and second light blocking films is used as a wiring line for use for electric connection.