Method of manufacturing organic light-emitting device
View Patent ↗The present invention provides a method of manufacturing an organic light-emitting device which is applicable to a large-screen display device. The method includes the steps of: forming, over a drive substrate, an element region including a drive transistor, and an organic electroluminescence element in which, an anode, an organic layer and a cathode are stacked in this order; and after the formation of the element region, repairing a short circuit area while setting at least the element region in an atmosphere in which an oxygen concentration is 0.1% or higher and less than 1% and a dew point is −50 degrees or less, and applying a voltage across the anode and the cathode.
1. A method of manufacturing an organic light-emitting device, comprising the steps of:
forming, over a drive substrate, an element region including a drive transistor, and an organic electroluminescence element in which, an anode, an organic layer and a cathode are stacked in this order;
after forming the element region, forming a protection film on the cathode;
after forming the protection film, repairing a short circuit area in which the anode contacts the cathode by applying a voltage across the anode and the cathode while simultaneously subjecting at least the element region, when the voltage is applied, in an atmosphere in which an oxygen concentration by volume is 0.1% or higher and less than 1% and a dew point temperature is −50 degrees or less, and
completing the manufacture of the organic light-emitting device, said repairing step occurring prior to the completion of the organic light-emitting device,
wherein,
the protection film is formed to have a thickness such that a part of the cathode within the short circuit area is not covered by the protection film,
the voltage applied across the anode and the cathode in repairing is of an alternating application method of alternately applying a forward-direction potential and an inverse-direction potential, and
the difference between the forward-direction potential and the inverse-direction potential applied to the organic electroluminescence element is set to 30V or higher, and equal to or lower than an initial withstand voltage of the drive transistor.
2. The method according to claim 1 , wherein the repairing step is performed in a state where the drive substrate over which the element region is formed in a chamber and a gas is introduced into the chamber.
3. The method according to claim 1 , wherein after forming the element region, and before the repairing step, the thickness of the protection film is such that a portion of the cathode is covered by the protection film and a portion of the short circuit area extends above the protection film.
4. The method of claim 3 , wherein the protection film has a thickness of 2 μm or less.
5. The method of claim 1 , wherein the repairing includes:
placing the drive substrate on a heat sink within a chamber, and
introducing a gas into the chamber to convert the atmosphere of the chamber such that the oxygen concentration by volume is 0.1% or higher and less than 1% and the dew point is −50 degrees or less.