Laser roughening to improve LED emissions
View Patent ↗An improved method of forming a LED with a roughened surface is described. Traditional methods of roughening a LED surface utilizes strong etchants that require sealing or protecting exposed areas of the LED. The described method uses a focused laser to separate the LED from the substrate, and a second laser to roughen the LED surface thereby avoiding the use of strong etchants. A mild etchant may be used on the laser roughened LED surface to remove unwanted metals.
1. A method of roughening a LED surface to improve light extraction efficiency comprising the operations of:
forming a LED structure over a substrate;
using a first laser to generate sufficient heat between the LED structure and the substrate to cause separation of the LED structure from the substrate in a laser lift off process;
using a focused second laser with a spot size less than 0.01 mm 2 to produce a series of small pits in a surface of the LED structure that was previously attached to the substrate thereby creating a pitted surface.
2. The method of claim 1 wherein the second laser is pulsed, the second laser gradually moved across the surface such that the pits approximately overlap.
3. The method of claim 2 wherein the second laser is a Nd:YAG laser.
4. The method of claim 3 wherein the Nd:YAG laser is frequency quadrupled to achieve wavelength near 266 nm.
5. The method of claim 4 wherein the LED structure includes at least one layer having a ratio aluminum to gallium that is less than 7 to 3.
6. The method of claim 4 wherein the LED structure is an alloy of at least one of GaN, AlN, InN, AlGaN, InGaN, or AlInGaN.
7. The method of claim 3 wherein the first laser used for laser lift off is an excimer laser.
8. The method of claim 1 wherein a depth of each pit is approximately between 100 nm and 2000 nm.
9. The method of claim 1 wherein the first laser used for laser lift off is defocused to create a spot size that exceeds 0.01 mm 2 such that the power per unit area is less than 2 J/cm 2 .
10. The method of claim 1 wherein the second laser delivers a power per unit area greater than 2 J/cm 2 .
11. The method of claim 1 further comprising the operation of:
exposing the pitted surface to an acid etch, the acid etch to remove a metallic residue that remains on the pitted surface.
12. The method of claim 11 wherein the acid used to perform the acid etch is a hydrochloric acid.
13. The method of claim 12 wherein the HCL concentration in the hydrochloric acid etch is between 50% and 5%.
14. The method of claim 11 wherein the acid is a weak acid such that the time of acid exposure and the strength of the acid used does not require sealing of exposed metal surface of the LED structure.
15. The method of claim 1 wherein the pit from the second laser is created from constructive interference in an interference pattern.
16. The method of claim 1 wherein the second laser has a non-uniform light intensity distribution over the laser spot area.
17. The method of claim 16 wherein the non-uniform light intensity distribution decomposes the LED material non-uniformly over the laser illuminated area.
18. A method of roughening a LED surface to improve light extraction efficiency comprising the operations of:
forming a n-doped layer over a substrate,
forming an active region of the n-doped layer, the active region to emit light;
using a first defocused laser delivering a power per unit area of less than 2 J/cm 2 to separate the n-doped layer from the substrate in a laser lift off process and to create a laser lift off surface of the n-doped layer;
using a second focused laser delivering a power per unit area in excess of 2 J/cm 2 to pit the laser lift off surface of the n-doped layer.
19. The method of claim 18 further comprising the operation of:
exposing the laser lift off surface of the n-doped layer to a HCL etch, the HCL etch to remove any excess metal that may remain after expose to both the first laser and the second laser.