Device for illuminating an area and device for applying light to a work area

1. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 );

a mask ( 14 ) having a plurality of openings ( 15 ) or transparent regions for passing the light ( 3 ) in a direction towards the area, and opaque regions ( 16 ) disposed between the openings ( 15 ) or transparent regions; and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the separate partial beams illuminating the mask with a spacing therebetween.

2. The device according to claim 1 , wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ).

3. The device according to claim 2 , wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ).

4. The device according to claim 3 , wherein all apertures of the second lenses ( 9 ) are identical.

5. The device according to claim 2 , wherein all apertures of the first lenses ( 7 ) are identical.

6. The device according to claim 2 , wherein the separation means ( 4 , 4 ′) further comprise:

at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 );

at least one third array ( 10 , 10 ′, 10 ″) of third lenses ( 11 ; 11 a , 11 b , 11 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a second direction (Y) perpendicular to the first direction (X), wherein the third lenses ( 11 ; 11 a , 11 b , 11 c ) all have the same focal length (f 11 );

at least one fourth array ( 12 , 12 ′, 12 ″) of fourth lenses ( 13 ; 13 a , 13 b , 13 c ) which is arranged in the propagation direction (Z) of the light ( 3 ) between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) and the area to be illuminated, wherein the fourth lenses ( 13 ; 13 a, 13 b, 13 c) all have the same focal length (f 13 ); and

wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) are formed as cylindrical lenses.

7. The device according to claim 2 , wherein the separation means ( 4 , 4 ′) further comprise:

at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 );

at least one third array ( 10 , 10 ′, 10 ″) of third lenses ( 11 ; 11 a , 11 b , 11 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a second direction (Y) perpendicular to the first direction (X), wherein the third lenses ( 11 ; 11 a , 11 b , 11 c ) all have the same focal length (f 11 );

at least one fourth array ( 12 , 12 ′, 12 ″) of fourth lenses ( 13 ; 13 a , 13 b , 13 c ) which is arranged in the propagation direction (Z) of the light ( 3 ) between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) and the area to be illuminated, wherein the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) all have the same focal length (f 13 ); and

wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) are arranged symmetrical with respect to the propagation direction (Z) of the light to be used for the illumination such that the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) do not alter the propagation direction (Z) of the light ( 3 ).

8. The device for illuminating an area according to claim 1 , wherein the mask ( 14 ) is for a lithographic application.

9. The device according to claim 1 , wherein the separation means comprise cylindrical lenses separated a predetermined distance from the mask.

10. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means ( 4 , 4 ′, 4 ″) comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ), and

wherein the distance between the at least one first array ( 6 , 6 ′, 6 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) in the propagation direction (Z) of the light ( 3 ) corresponds to the sum of the focal length (f 7 ) of the first lenses ( 7 ; 7 a , 7 b , 7 c ) and the focal length (f 9 ) of the second lenses ( 9 ; 9 a , 9 b , 9 c ).

11. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ), and

wherein at least one of the apertures of the first lenses ( 7 a , 7 b , 7 c ) is different from the other apertures of the first lenses ( 7 a , 7 b , 7 c ).

12. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ), and

wherein at least one of the apertures of the second lenses ( 9 a , 9 b , 9 c ) is different from the other apertures of the second lenses ( 9 a , 9 b , 9 c ).

13. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ), and

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one third array ( 10 , 10 ′, 10 ″) of third lenses ( 11 ; 11 a , 11 b , 11 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a second direction (Y) perpendicular to the first direction (X), wherein the third lenses ( 11 ; 11 a , 11 b , 11 c ) all have the same focal length (f 11 ).

14. The device according to claim 13 , wherein the third array ( 10 , 10 ′, 10 ″) is arranged between the first array ( 6 , 6 ′, 6 ″) and the second array ( 8 , 8 ′, 8 a ″, 8 b ″).

15. The device according to claim 13 , wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one fourth array ( 12 , 12 ′, 12 ″) of fourth lenses ( 13 ; 13 a , 13 b , 13 c ) which is arranged in the propagation direction (Z) of the light ( 3 ) between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) and the area to be illuminated, wherein the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) all have the same focal length (f 13 ).

16. The device according to claim 11 , wherein the distance between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one fourth array ( 12 , 12 ′, 12 ″) in the propagation direction (Z) of the light ( 3 ) corresponds to the sum of the focal length (f 11 ) of the third lenses ( 11 ; 11 a , 11 b , 11 c ) and the focal length of the fourth lenses ( 13 ; 13 a , 13 b , 13 c ).

17. The device according to claim 15 , wherein each of the fourth lenses ( 13 ) has an aperture and all apertures of the fourth lenses ( 14 ) are identical.

18. The device according to claim 15 , wherein each of the fourth lenses ( 13 ) has an aperture and at least one of the apertures of the fourth lenses ( 13 a , 13 b , 13 c ) is different from other apertures of the fourth lenses ( 13 a , 13 b , 13 c ).

19. The device according to claim 13 , wherein each of the third lenses ( 11 ) has an aperture and all apertures of the third lenses ( 11 ) are identical.

20. The device according to claim 13 , wherein each of the third lenses ( 11 ) has an aperture and at least one of the apertures of the third lenses ( 11 a , 11 b , 11 c ) is different from other apertures of the third lenses ( 11 a , 11 b , 11 c ).

21. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ), and

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one third array ( 10 , 10 ′, 10 ″) of third lenses ( 11 ; 11 a , 11 b , 11 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a second direction (Y) perpendicular to the first direction (X), wherein the third lenses ( 11 ; 11 a , 11 b , 11 c ) all have the same focal length (f 11 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one fourth array ( 12 , 12 ′, 12 ″) of fourth lenses ( 13 ; 13 a , 13 b , 13 c ) which is arranged in the propagation direction (Z) of the light ( 3 ) between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) and the area to be illuminated, wherein the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) all have the same focal length (f 13 ),

wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) are formed as cylindrical lenses, and

wherein cylinder axes of the first and the second lenses ( 7 ; 7 a , 7 b , 7 c ; 9 ; 9 a , 9 b , 9 c ) extend in the second direction (Y).

22. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ), and

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one third array ( 10 , 10 ′, 10 ″) of third lenses ( 11 ; 11 a , 11 b , 11 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a second direction (Y) perpendicular to the first direction (X), wherein the third lenses ( 11 ; 11 a , 11 b , 11 c ) all have the same focal length (f 11 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one fourth array ( 12 , 12 ′, 12 ″) of fourth lenses ( 13 ; 13 a , 13 b , 13 c ) which is arranged in the propagation direction (Z) of the light ( 3 ) between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) and the area to be illuminated, wherein the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) all have the same focal length (f 13 ),

wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) are formed as cylindrical lenses, and

wherein cylinder axes of the third and the fourth lenses ( 11 ; 11 a , 11 b , 11 c ; 13 ; 13 a , 13 b , 13 c ) extend in the first direction (X).

23. A device for illuminating an area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for an illumination;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 ); and

separation means ( 4 , 4 ′, 4 ″) for dividing the light ( 3 ) to be used for the illumination into several mutually separated partial beams ( 5 ), the partial beams illuminating the area to be illuminated with a spacing therebetween,

wherein the separation means comprise at least one first array ( 6 , 6 ′, 6 ″) of first lenses ( 7 ; 7 a , 7 b , 7 c ) dividing the light ( 3 ) into separate partial beams ( 5 ) at least with respect to a first direction (X), wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) each have apertures and all have the same focal length (f 7 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) of second lenses ( 9 ; 9 a , 9 b , 9 c ) which is arranged in a propagation direction (Z) of the light ( 3 ) between the at least one first array ( 6 , 6 ′, 6 ″) and the area to be illuminated, wherein the second lenses ( 9 ; 9 a , 9 b , 9 c ) each have apertures and all have the same focal length (f 9 ), and

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one third array ( 10 , 10 ′, 10 ″) of third lenses ( 11 ; 11 a , 11 b , 11 c ) dividing the light ( 3 ) into the separate partial beams ( 5 ) at least with respect to a second direction (Y) perpendicular to the first direction (X), wherein the third lenses ( 11 ; 11 a , 11 b , 11 c ) all have the same focal length (f 11 ),

wherein the separation means ( 4 , 4 ′, 4 ″) further comprise at least one fourth array ( 12 , 12 ′, 12 ″) of fourth lenses ( 13 ; 13 a , 13 b , 13 c ) which is arranged in the propagation direction (Z) of the light ( 3 ) between the at least one third array ( 10 , 10 ′, 10 ″) and the at least one second array ( 8 , 8 ′, 8 a ″, 8 b ″) and the area to be illuminated, wherein the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) all have the same focal length (f 13 ),

wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) are formed as cylindrical lenses,

wherein the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) are arranged asymmetrical with respect to the propagation direction (Z) of the light ( 3 ) such that the first lenses ( 7 ; 7 a , 7 b , 7 c ) and/or the second lenses ( 9 ; 9 a , 9 b , 9 c ) and/or the third lenses ( 11 ; 11 a , 11 b , 11 c ) and/or the fourth lenses ( 13 ; 13 a , 13 b , 13 c ) alter the propagation direction (Z) of the light ( 3 ).

24. A device for applying light to a work area, comprising:

at least one light source ( 1 ) for producing light ( 3 ) for applying the light to the work area;

optics means ( 2 ) for shaping the light ( 3 ) produced by the at least one light source ( 1 );

a mask ( 14 ) having a plurality of openings ( 15 ) or transparent regions for passing the light ( 3 ) in a direction towards the work area, and opaque regions ( 16 ) disposed between the openings ( 15 ) or transparent regions; and

separation means ( 4 , 4 ′) dividing the light ( 3 ) to be applied into several mutually separate partial beams ( 5 ) so that the separate partial beams ( 5 ) illuminate the mask ( 14 ) with a spacing therebetween, wherein at least one of the transparent regions or openings is fully illuminated, whereas the opaque regions ( 16 ) of the mask ( 14 ) arranged between the openings ( 15 ) or between the transparent regions are at least partially not illuminated.

25. The device according to claim 24 , wherein the work area is a lithograph application.

26. The device according to claim 24 , wherein every transparent region or opening is illuminated.

27. The device according to claim 24 , wherein the separation means comprise cylindrical lenses separated a predetermined distance from the mask.