Methods for creating a magnetic main pole with side shield and systems thereof
View Patent ↗A method according to another embodiment includes forming a side shield layer of ferromagnetic material above a substrate; masking the side shield layer; milling an unmasked region of the side shield layer for forming a pole trench therein; and forming a pole layer in the pole trench. A structure according to one embodiment includes a substrate; a side shield layer of ferromagnetic material on the substrate, wherein the substrate has a region covered by the side shield layer and a region not covered by the side shield layer; a pole trench in the side shield layer and the region of the substrate not covered by the side shield layer; a layer of nonmagnetic material in the pole trench; and a pole layer in the pole trench, wherein the pole layer has a greater thickness above the region of the substrate not covered by the side shield layer than above the region of the substrate covered by the side shield layer.
1. A method, comprising:
forming a side shield layer of ferromagnetic material on a substrate such that the substrate has a region covered by the side shield layer and a region not covered by the side shield layer;
masking the side shield layer and the uncovered region of the substrate;
forming a pole trench in an unmasked region of the side shield layer and an unmasked region of the substrate;
forming a layer of nonmagnetic material in the pole trench;
forming a pole layer in the pole trench above the layer of nonmagnetic material and the substrate; and
planarizing the pole layer, wherein the pole layer has a greater thickness above the region of the substrate not covered by the side shield layer than above the region of the substrate covered by the side shield layer.
2. A method as recited in claim 1 , wherein the pole trench is formed in the side shield layer by milling.
3. A method as recited in claim 1 , wherein the pole layer is formed by plating.
4. A method as recited in claim 1 , wherein the pole layer has a flare point defined away from the side shield layer.
5. A method as recited in claim 1 , wherein the side shield layer is formed with a preliminary trench therein at a location of where the pole trench is formed in a subsequent step.
6. A method as recited in claim 1 , further comprising forming a top shield above the pole layer.
7. A method as recited in claim 6 , further comprising forming a layer of nonmagnetic material between the top shield and the pole layer, wherein the top shield is in electrical communication with the side shield layer.
8. A method as recited in claim 6 , further comprising forming a layer of nonmagnetic material between the top shield and the pole and side shield layers.
9. A method, comprising:
forming a side shield layer of ferromagnetic material above a substrate;
masking the side shield layer;
milling an unmasked region of the side shield layer for forming a pole trench therein; and
forming a pole layer in the pole trench,
wherein the side shield layer is formed with a preliminary trench therein at a location of where the pole trench is formed in a subsequent step.
10. A method as recited in claim 9 , wherein the pole layer is formed by plating.
11. A method as recited in claim 9 , wherein the pole layer has a flare point defined away from the side shield layer.
12. A method as recited in claim 9 , further comprising forming a top shield above the pole layer.
13. A method as recited in claim 12 , further comprising forming a layer of nonmagnetic material between the top shield and the pole layer.
14. A method as recited in claim 13 , wherein the top shield is in electrical communication with the side shield layer.
15. A method as recited in claim 9 , wherein the pole layer has a greater thickness in the unmasked region of the substrate than in the unmasked region of the side shield layer.
16. A method, comprising:
forming a side shield layer of ferromagnetic material above a substrate;
masking the side shield layer;
milling an unmasked region of the side shield layer for forming a pole trench therein;
forming a pole layer in the pole trench, and
milling the substrate for forming a pole trench therein, and forming the pole layer in the pole trench of the substrate.
17. A method as recited in claim 16 , further comprising planarizing the pole layer, wherein the pole layer has a greater thickness above the pole trench of the substrate than above the pole trench of the side shield layer.
18. A structure, comprising:
a substrate;
a side shield layer of ferromagnetic material on the substrate, wherein the substrate has a region covered by the side shield layer and a region not covered by the side shield layer;
a pole trench in the side shield layer and the region of the substrate not covered by the side shield layer;
a layer of nonmagnetic material in the pole trench; and
a pole layer in the pole trench, wherein the pole layer has a greater thickness above the region of the substrate not covered by the side shield layer than above the region of the substrate covered by the side shield layer.
19. A structure as recited in claim 18 , wherein the pole trench has sidewalls characterized as having an angled or concave shape resulting from milling.
20. A structure as recited in claim 18 , further comprising a top shield above the pole layer.
21. A structure as recited in claim 20 , further comprising forming a layer of nonmagnetic material between the top shield and the pole layer.