IP Library Granted Patent US 8,637,761
Granted Patent B2
US 8,637,761 · App. 12/343,116 · Granted Jan 28, 2014

Solar cells fabricated by using CVD epitaxial Si films on metallurgical-grade Si wafers

Inventors: Jianming Fu (Palo Alto, CA); Zheng Xu (Pleasanton, CA); Peijun Ding (Saratoga, CA); Chentao Yu (Sunnyvale, CA); Guanghua Song (Fremont, CA); Jianjun Liang (Fremont, CA)
Assignee: Silevo, Inc.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,637,761
App. No.
12/343,116
Granted
Jan 28, 2014
Kind
B2
Abstract

One embodiment of the present invention provides a method for fabricating a solar cell. The method includes: melting a metallurgical-grade (MG) Si feedstock, lowering a single-crystalline Si seed to touch the surface of the molten MG-Si, slowly pulling out a single-crystal Si ingot of the molten MG-Si, processing the Si ingot into single crystal Si wafers to form MG-Si substrates for subsequent epitaxial growth, leaching out residual metal impurities in the MG-Si substrate, epitaxially growing a layer of single-crystal Si thin film doped with boron on the MG-Si substrate, doping phosphor to the single-crystal Si thin film to form an emitter layer, depositing an anti-reflection layer on top of the single-crystal Si thin film, and forming the front and the back electrical contacts.

Claims (42)

1. A method for fabricating a solar cell, the method comprising:

purifying a metallurgical-grade (MG) Si feedstock using a directional solidification process;

melting the purified MG-Si feedstock;

lowering a single-crystal Si seed to touch the surface of the molten MG-Si;

slowly pulling a single-crystal Si ingot out of the molten MG-Si;

processing the Si ingot into wafers to form a plurality of MG-Si substrates for subsequent epitaxial growth, wherein a respective MG-Si substrate has a metal impurity level below 1e16/cm 3 ;

creating a plurality of pores on an upper surface of the MG-Si substrate to form a porous-Si layer, wherein the porous-Si layer has a porosity of less than 20%;

leaching out residual metal impurities in the MG-Si substrate, wherein leaching out the residual metal impurities involves using HCl gas to react with the residual metal impurities;

epitaxially growing a layer of single-crystal Si thin film doped with boron on top of the porous-Si layer;

doping phosphorus into the single-crystal Si thin film to form an emitter layer;

depositing an anti-reflection layer on top of the single-crystal Si thin film; and

forming front and the back electrical contacts.

2. The method of claim 1 , wherein epitaxially growing a layer of single-crystal Si thin film comprises:

epitaxially growing a heavily boron-doped Si layer on the upper surface of the MG-Si substrate to form a back surface field (BSF) layer; and

epitaxially growing a lightly boron-doped Si layer on the heavily boron-doped Si layer.

3. The method of claim 2 , wherein the heavily boron-doped Si layer has a boron concentration up to 1×10 2 ° atoms/cm 3 and a thickness between 0.5 and 5 micrometers, and wherein the lightly boron-doped Si layer has a boron concentration up to 4×10 16 atoms/cm 3 and a thickness between 20 and 100 micrometers.

4. The method of claim 1 , wherein epitaxially growing the single-crystal Si thin film comprises a chemical-vapor-deposition (CVD) process.

5. The method of claim 4 , wherein the CVD process is performed at a temperature between 1100° C. and 1250° C.

6. The method of claim 1 , wherein the single-crystal Si thin film has a thickness between 2 and 100 micrometers.

7. The method of claim 1 , wherein the MG-Si feedstock has a purity of 99.9% or better.

8. A solar cell fabricated using a metallurgical-grade (MG) Si wafer as a substrate, the solar cell comprising:

an MG-Si substrate, wherein the MG-Si substrate includes a porous layer having a porosity of less than 20%, wherein the MG-Si substrate has a metal impurity level below 1e16/cm 3 , and wherein the MG-Si substrate is formed using a method comprising:

purifying a metallurgical-grade (MG) Si feedstock using a directional solidification process;

melting the purified MG-Si feedstock;

slowly pulling a single-crystal Si ingot out of the molten MG-Si;

processing the Si ingot into wafers to form a plurality of MG-Si substrates for subsequent epitaxial growth;

forming a plurality of pores on upper surfaces of the MG-Si substrates to form the porous-Si layer; and

leaching out residual metal impurities in the MG-Si substrates,

wherein leaching out the residual metal impurities involves using HCl gas to react with the residual metal impurities;

a p-type doped single-crystal Si thin film situated directly on top of the porous-Si layer;

an n-type doped single-crystal Si thin film situated above the p-type doped Si thin film;

an anti-reflection layer situated above the n-type doped single-crystal Si thin film;

a back metal layer situated below the MG-Si substrate; and

a front electrode situated above the anti-reflection layer.

9. The solar cell of claim 8 , wherein the p-type doped single-crystal Si thin film comprises a heavily boron-doped Si layer as a BSF layer situated above the MG-Si substrate and a lightly boron-doped Si layer situated above the heavily boron-doped Si layer.

10. The solar cell of claim 9 , wherein the heavily boron-doped Si layer has a boron concentration up to 1×10 2 ° atoms/cm 3 and a thickness between 0.5 and 5 micrometers, and wherein the lightly boron-doped Si layer has a boron concentration up to 4×10 16 atoms/cm 3 and a thickness between 20 and 100 micrometers.

11. The solar cell of claim 8 , wherein the p-type doped single-crystal Si thin film is epitaxially grown using a chemical-vapor-deposition (CVD) process.

12. The solar cell of claim 11 , wherein the CVD process is performed at a temperature between 1100° C. and 1250° C.

13. The solar cell of claim 8 , wherein the p-type doped single-crystal Si thin film has a thickness between 2 and 100 micrometers.

14. The solar cell of claim 8 , wherein the MG-Si feedstock has a purity of 99.9% or better.

15. The method of claim 1 , wherein leaching out the residual metal impurities comprises subjecting the MG-Si substrate to hydrogen-chloride gas at a temperature higher than 800° C.

16. The method of claim 1 , further comprising chemically polishing the MG-Si substrate in liquid chemicals to achieve a smooth surface before epitaxial deposition of Si film.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2021
From: SOLARCITY CORPORATION
To: TESLA, INC.
Reel/Frame 056172/0062 →
MERGER AND CHANGE OF NAME Recorded May 17, 2016
From: SILEVO, INC.; SUNFLOWER ACQUISITION LLC
To: SILEVO, LLC.
Reel/Frame 038620/0023 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2015
From: SILEVO LLC
To: SOLARCITY CORPORATION
Reel/Frame 035559/0179 →
CHANGE OF NAME Recorded Sep 26, 2011
From: SIERRA SOLAR POWER, INC.
To: SILEVO, INC.
Reel/Frame 026978/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 22, 2009
From: FU, JIANMING; XU, ZHENG; DING, PEIJUN; YU, CHENTAO; SONG, GUANGHUA; LIANG, JIANJUN
To: SIERRA SOLAR POWER, INC.
Reel/Frame 022142/0510 →
Continuity (3)
Provisional Application 61097471 · Sep 16, 2008
Provisional Application 61102228 · Oct 2, 2008
Related Publication 20100065111A1 · Mar 18, 2010