Method for manufacturing a magnetic write head
View Patent ↗A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.
1. A method for manufacturing a magnetic write head, comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
forming a mask structure over the magnetic write pole material, the mask structure including a hard mask layer formed on the magnetic write pole material, a marker layer formed on the hard mask layer and a RIEable image transfer layer formed on the marker layer;
performing a first ion milling to remove portions of the write pole material that are not protected by the mask structure, thereby forming a write pole structure having first and second sides;
depositing a non-magnetic material over the remaining mask structure and write pole; and
performing second ion milling sufficiently to expose the remaining mask and until the marker layer has been detected;
wherein the second ion milling is performed sufficiently to form a recess in the substrate.
2. A method for manufacturing a magnetic write head, comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
forming a mask structure over the magnetic write pole material, the mask structure including a hard mask layer formed on the magnetic write pole material, a marker layer formed on the hard mask layer and a RIEable image transfer layer formed on the marker layer;
performing a first ion milling to remove portions of the write pole material that are not protected by the mask structure, thereby forming a write pole structure having first and second sides;
depositing a non-magnetic material over the remaining mask structure and write pole; and
performing second ion milling sufficiently to expose the remaining mask and until the marker layer has been detected;
wherein the second ion milling is performed sufficiently to form a recess in the substrate, the method further comprising forming a magnetic trailing wrap-around shield that extends into the recess in the substrate.
3. A method for manufacturing a magnetic write head, comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
forming a mask structure over the magnetic write pole material, the mask structure including a hard mask layer formed on the magnetic write pole material, a marker layer formed on the hard mask layer and a RIEable image transfer layer formed on the marker layer;
performing a first ion milling to remove portions of the write pole material that are not protected by the mask structure, thereby forming a write pole structure having first and second sides;
depositing a non-magnetic material over the remaining mask structure and write pole; and
performing second ion milling sufficiently to expose the remaining mask and until the marker layer has been detected;
wherein the second ion milling is performed sufficiently to form a recess in the substrate.
4. A method for manufacturing a magnetic write head, comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
forming a mask structure over the magnetic write pole material, the mask structure including a hard mask layer formed on the magnetic write pole material, a marker layer formed on the hard mask layer and a RIEable image transfer layer formed on the marker layer;
performing a first ion milling to remove portions of the write pole material that are not protected by the mask structure, thereby forming a write pole structure having first and second sides;
depositing a non-magnetic material over the remaining mask structure and write pole; and
performing second ion milling sufficiently to expose the remaining mask and until the marker layer has been detected;
wherein the second ion milling is performed sufficiently to form a recess in the substrate, the method further comprising forming a magnetic trailing wrap-around shield that extends into the recess in the substrate.