Image sensor and method for manufacturing the same
Embodiments relate to an image sensor and a method of manufacturing an image sensor. According to embodiments, an image sensor may include a first substrate, a photodiode, and an ion implantation isolation layer. According to embodiments, circuitry including a metal interconnection may be disposed over the first substrate. A photodiode may be provided in a crystalline semiconductor layer bonded to the first substrate, and electrically connected to the metal interconnection. The ion implantation isolation layer may be provided in the photodiode.
1. A method, comprising:
providing a first substrate;
forming circuitry including a metal interconnection over the first substrate;
forming a photodiode in a crystalline semiconductor layer of a second substrate;
forming an ion implantation isolation layer in the photodiode;
bonding the first substrate to the second substrate to connect the photodiode to the metal interconnection; and
removing a lower portion of the second substrate to expose the photodiode,
wherein forming the photodiode comprises:
forming a second conduction type conduction layer in the crystalline semiconductor layer; and
forming a first conduction type conduction layer over the second conduction type conduction layer,
wherein forming the ion implantation isolation layer in the photodiode comprises forming a second conduction type first ion implantation isolation layer over the first conduction type conduction layer,
wherein forming the ion implantation isolation layer in the photodiode comprises forming a second conduction type second ion implantation isolation layer at an interface between pixels of the photodiode.
2. The method of claim 1 , comprising forming the second conduction type conduction layer at a junction depth of less than approximately 0.5 μm.
3. The method of claim 1 , comprising forming the first conduction type conduction layer at a junction depth ranging from approximately 1.0 μm to 2.0 μm.
4. The method of claim 1 , comprising forming the ion implantation isolation layer over at least one of a side of the photodiode and a bottom of the photodiode.
5. The method of claim 1 , wherein the ion implantation isolation layer comprises a P0 layer.
6. The method of claim 1 , comprising:
forming a dielectric over the photodiode of the second substrate before bonding the first and second substrates; and
forming a metal pad in the dielectric.
7. The method of claim 1 , wherein bonding the first substrate to the second substrate comprises contacting the first substrate and the second substrate with each other and performing activation by plasma.
8. The method of claim 1 , wherein forming the circuitry including the metal interconnection comprises forming a metal and a plug over the first substrate.
9. The method of claim 1 , wherein the second conduction type second ion implantation isolation layer is disposed to directly contact on a top surface of the second conduction type first ion implantation isolation layer and a bottom surface of the second conduction type conduction layer.