Semiconductor chip and semiconductor device
View Patent ↗A semiconductor chip, including: a substrate including an front surface; an integrated circuit formed on the front surface and including a plurality of semiconductor elements; and a heat-radiating plug formed in a region of the substrate corresponding to at least one of the semiconductor elements. The heat-radiating plug is made of a material having a thermal conductivity greater than that of the substrate formed in a non-penetrating hole having its opening on a reverse surface of the substrate.
1. A semiconductor chip, comprising:
a substrate having a front surface and a reverse surface opposite to the front surface;
an integrated circuit disposed in the front surface of the substrate, the integrated circuit including a plurality of semiconductor elements;
a first penetrating plug penetrating from the reverse surface of the substrate to a middle of the substrate so that the first penetrating plug is disposed apart from the front surface of the substrate;
a second penetrating plug penetrating from the reverse surface of the substrate to the front surface of the substrate, wherein:
an area of a portion of the first penetrating plug that is exposed on the reverse surface is smaller than an area of a portion of the second penetrating plug that is exposed on the reverse surface.
2. The semiconductor chip of claim 1 , further comprising a first insulating film disposed between the first penetrating plug and the substrate.
3. The semiconductor chip of claim 2 , further comprising:
a metal layer disposed on the reverse surface and connected to the first penetrating plug; and
a second insulating film formed between the reverse surface and the metal layer.
4. The semiconductor chip of claim 1 , wherein the first penetrating plug is made of a metal material including copper.
5. The semiconductor chip of claim 1 , wherein:
the substrate has a center portion and a periphery portion surrounding the center portion in a plan view,
an area of the periphery portion is smaller than that of the center portion, and
the first penetrating plug is disposed in the periphery portion.
6. The semiconductor chip of claim 1 , wherein:
the first penetrating plug has an inner side surface and an inner bottom surface being opposed to the reverse surface,
the first penetrating plug has a first metal film,
the first metal film has a first depression in a region corresponding to the first penetrating plug,
a first distance between the inner bottom surface of the first penetrating plug and the first depression is longer than a second distance between the inner side surface of the first penetrating plug and the first depression.
7. The semiconductor chip of claim 1 , wherein:
the substrate has a center portion and a periphery portion surrounding the center portion in a plan view,
an area of the periphery portion is smaller than that of the center portion, and
the second penetrating plug surrounds the center portion.
8. The semiconductor chip of claim 1 , wherein:
the second penetrating plug has an inner side surface and an inner bottom surface being opposed to the reverse surface,
the second penetrating plug has a second metal film,
the second metal film has a second depression in a region corresponding to the second penetrating plug, and
a first distance between the inner bottom surface of the second penetrating plug and the second depression is longer than a second distance between the inner side surface of the second penetrating plug and the second depression.
9. A semiconductor chip, comprising:
a substrate having a front surface and a reverse surface opposite to the front surface;
an integrated circuit disposed in the front surface of the substrate, the integrated circuit including a plurality of semiconductor elements;
a first penetrating hole having a inner side surface and a inner bottom surface being opposed to the reverse surface, the first penetrating hole penetrating from the reverse surface of the substrate to a middle of the substrate so that the inner bottom surface of the first penetrating hole is apart from the front surface of the substrate; and
a first metal film disposed in the first penetrating hole,
wherein the first metal film has a first depression in a region corresponding to the first penetrating hole.
10. The semiconductor chip of claim 9 , further comprising an insulating film disposed on the reverse surface and extending from the reverse surface to the inner side surface.
11. The semiconductor chip of claim 9 , wherein a first distance between the inner bottom surface of the first penetrating hole and the first depression is longer than a second distance between the inner side surface of the first penetrating hole and the first depression.
12. The semiconductor chip of claim 9 , further comprising:
a second penetrating hole having a inner side surface and a inner bottom surface being opposed to the reverse surface, the second penetrating hole penetrating from the reverse surface of the substrate to the front surface of the substrate; and
a second metal film disposed in the second penetrating hole,
wherein the second metal film has a second depression in a region corresponding to the second penetrating hole.
13. The semiconductor chip of claim 12 ,
wherein a first distance between the inner bottom surface of the second penetrating hole and the second depression is longer than a second distance between the inner side surface of the second penetrating hole and the second depression.
14. A semiconductor chip, comprising:
a substrate having a front surface and a reverse surface opposite to the front surface;
an integrated circuit disposed in the front surface of the substrate, the integrated circuit including a plurality of semiconductor elements;
a first penetrating hole having an inner side surface and an inner bottom surface being opposed to the reverse surface, the first penetrating hole penetrating from the reverse surface of the substrate to a middle of the substrate so that the inner bottom surface of the first penetrating hole is apart from the front surface of the substrate; and
a first metal film disposed in the first penetrating hole,
wherein a diameter of the first penetrating hole is smaller than a height of the first penetrating hole.
15. The semiconductor chip of claim 14 , further comprising an insulating film disposed on the reverse surface and extending from the reverse surface to the inner side surface.
16. The semiconductor chip of claim 14 , wherein:
the first metal film has a first depression in a region corresponding to the first penetrating hole, and
a first distance between the inner bottom surface of the first penetrating hole and the first depression is longer than a second distance between the inner side surface of the first penetrating hole and the first depression.
17. The semiconductor chip of claim 14 ,
wherein the substrate has a center portion and a periphery portion surrounding the center portion in a plan view,
an area of the periphery portion is smaller than that of the center portion, and
the first penetrating hole is disposed in the periphery portion.
18. The semiconductor chip of claim 14 , further comprising a second penetrating plug penetrating from the reverse surface of the substrate to the front surface of the substrate, wherein:
the substrate has a center portion and a periphery portion surrounding the center portion in a plan view,
an area of the periphery portion is smaller than that of the center portion, and
the second penetrating plug surrounds the center portion.
19. The semiconductor chip of claim 14 , further comprising:
a second penetrating hole having a inner side surface and a inner bottom surface being opposed to the reverse surface, the second penetrating hole penetrating from the reverse surface of the substrate to the front surface of the substrate; and
a second metal film disposed in the second penetrating hole,
wherein the second metal film has a second depression in a region corresponding to the second penetrating hole.
20. The semiconductor chip of claim 19 ,
wherein a first distance between the inner bottom surface of the second penetrating hole and the second depression is longer than a second distance between the inner side surface of the second penetrating hole and the second depression.
21. A semiconductor chip, comprising:
a semiconductor substrate having a front surface and a reverse surface opposite to the front surface;
an integrated circuit disposed in the front surface of the substrate; and
a heat-radiating plug disposed in a first penetrating hole penetrating from the reverse surface of the semiconductor substrate to a middle of the semiconductor substrate so that an inner bottom surface of the first penetrating hole is apart from the front surface of the semiconductor substrate.