Vibrating piece manufacturing method and vibrator manufacturing method
View Patent ↗A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
1. A vibrating piece manufacturing method, comprising:
(a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and
(b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction, wherein:
before step (b), a weight metal film is formed on the second surface of each of the arms,
in step (b), a surface of the weight metal film is also etched, and
in step (b), steps are formed between a part of the second surface of each of the arms covered by the weight metal film and surfaces of etched parts of each of the arms.
2. The vibrating piece manufacturing method according to claim 1 , wherein
the supporting body is made of a piezoelectric material.
3. A vibrator manufacturing method comprising:
(a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area;
(b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction, wherein:
before step (b), a weight metal film is formed on the second surface of each of the arms,
in step (b), a surface of the weight metal film is also etched, and
in step (b), steps are formed between a part of the second surface of each of the arms covered by the weight metal film and surfaces of etched parts of each of the arms;
(c) incorporating a vibrating piece manufactured by performing steps (a) and (b), into a package; and
(d) covering an opening of the package with a lid.