Multilayer coating package on flexible substrates for electro-optical devices
View Patent ↗An electro-optical device having at least one base and a multilayer coating surface disposed on at least one surface of the base. The at least one base may comprise either an optically or electronically active portion or a flexible polymeric material. The multilayer coating set comprises at least one organic layer and at least one inorganic layer. The base and multilayer coating set are transparent. The multilayer coating set provides a barrier to moisture and oxygen and provides chemical resistance. The multilayer coating set is also mechanically flexible and thermally stable up to a glass transition temperature of the base.
1. A method of making a device comprising the steps of:
providing a base having at least one surface, the base comprising a flexible polymeric material; and
placing a multilayer coating on at least one surface the base, the coating comprising at least one organic layer and at least one inorganic layer,
wherein the coating provides a barrier to moisture and oxygen and provides chemical resistance, and
wherein the organic layer is deposited by one of plasma enhanced chemical vapor deposition, expanding thermal plasma, microwave plasma, inductively coupled plasma, and high density plasma chemical vapor deposition.
2. The method of claim 1 wherein the organic layer is deposited by one of sputtering, laser ablation, cathodic arc deposition, and electron beam evaporation.
3. The method of claim 1 wherein the multilayer coating is deposited by a vacuum deposition technique.
4. The method of claim 3 wherein the inorganic layer is deposited by one of plasma deposition and physical vapor deposition.
5. The method of claim 4 wherein the inorganic layer is deposited by one of plasma enhanced chemical vapor deposition, expanding thermal plasma, microwave plasma, inductively coupled plasma, and high density plasma chemical vapor deposition.
6. The method of claim 4 wherein the inorganic layer is deposited by one of sputtering, laser ablation, cathodic arc deposition, and electron beam evaporation.
7. The method of claim 4 wherein the organic layer is deposited by one of plasma deposition, physical vapor deposition, and polymer monolithic layer deposition.
8. The method of claim 1 wherein the flexible polymeric material comprises a polycarbonate.
9. The method of claim 1 wherein the organic layer comprises at least one of a parylene, an acrylic, a siloxane, xylene, an alkene, styrene, an organosilane, an organosilazane, and an organosilicone.
10. The method of claim 1 wherein the organic layer includes at least one of an adhesion layer, a stress relief layer, a conformal layer, a chemically resistant layer, an abrasion resistance layer, and combinations thereof.
11. The method of claim 10 wherein the chemically resistant layer is resistant to at least one of alkali solutions, acids, and organic solvents.
12. The method of claim 1 wherein the inorganic layer comprises at least one of a metal oxide, a metal nitride, silicon oxide, silicon nitride, and combinations thereof.
13. The method of claim 12 wherein the inorganic layer comprises at least one of indium zinc oxide, indium tin oxide, silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, zinc oxide, indium oxide, tin oxide, cadmium tin oxide, cadmium oxide, and magnesium oxide.
14. The method of claim 1 wherein the inorganic layer includes at least one of an ultraviolet radiation absorbent layer, an infrared radiation absorbent layer, a barrier layer, an electrically conductive layer, an anti-reflective layer, and combinations thereof.
15. The method of claim 14 wherein the barrier layer is a moisture barrier layer having a water vapor transmission rate of less than 0.1 g/m 2 -day at 100% relative humidity and 35° C.
16. The method of claim 14 wherein the barrier layer is an oxygen barrier layer having an oxygen transmission rate of less than 0.1 cc/m 2 -day for oxygen diffusion in a 21% oxygen atmosphere at 25° C.
17. The method of claim 1 wherein the coating has a thickness from about 0.05 microns to about 50 microns.
18. The method of claim 1 wherein the coating has a thickness from about 0.1 micron to about 10 microns.
19. The method of claim 1 wherein the device is an electro-optical device and is one of an electrochromic device, a liquid crystal display, an organic light emitting diode, a light emitting diode, a photovoltaic device, and an x-ray detector.
20. The method of claim 1 wherein the coating further includes a transparent inorganic conductive layer.
21. The method of claim 20 wherein the transparent inorganic conductive layer comprises indium tin oxide.
22. The method of claim 1 wherein at least one of the base and the coating are transparent.
23. The method of claim 1 wherein the coating is mechanically flexible and thermally stable up to a glass transition temperature of the base.
24. A method of making a multilayer coating for an electro-optical device comprising the steps of:
providing at least one inorganic layer; and
providing at least one organic layer adjacent to the inorganic layer,
wherein the coating provides a barrier to moisture and oxygen for the electro-optical device; and
wherein the organic layer is deposited by one of plasma enhanced chemical vapor deposition, expanding thermal plasma, microwave plasma, inductively coupled plasma, and high density plasma chemical vapor deposition.
25. The method of claim 24 wherein the organic layer is deposited by one of sputtering, laser ablation, cathodic arc deposition, and electron beam evaporation.
26. The method of claim 24 wherein the multilayer coating is deposited by a vacuum deposition technique.
27. The method of claim 26 wherein the inorganic layer is deposited by one of plasma deposition and physical vapor deposition.
28. The method of claim 27 wherein the inorganic layer is deposited by one of plasma enhanced chemical vapor deposition, expanding thermal plasma, microwave plasma, inductively coupled plasma, and high density plasma chemical vapor deposition.
29. The method of claim 27 wherein the inorganic layer is deposited by one of sputtering, laser ablation, cathodic arc deposition, and electron beam evaporation.
30. The method of claim 27 wherein the organic layer is deposited by one of plasma deposition, physical vapor deposition, and polymer monolithic layer deposition.
31. The method of claim 24 wherein the flexible polymeric material comprises a polycarbonate.
32. The method of claim 24 wherein the organic layer comprises at least one of a parylene, an acrylic, a siloxane, xylene, an alkene, styrene, an organosilane, an organosilazane, and an organosilicone.
33. The method of claim 24 wherein the organic layer includes at least one of an adhesion layer, a stress relief layer, a conformal layer, a chemically resistant layer, an abrasion resistance layer, and combinations thereof.
34. The method of claim 33 wherein the chemically resistant layer is resistant to at least one of alkali solutions, acids, and organic solvents.
35. The method of claim 24 wherein the inorganic layer comprises at least one of a metal oxide, a metal nitride, silicon oxide, silicon nitride, and combinations thereof.
36. The method of claim 35 wherein the inorganic layer comprises at least one of indium zinc oxide, indium tin oxide, silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum oxynitride, zinc oxide, indium oxide, tin oxide, cadmium tin oxide, cadmium oxide, and magnesium oxide.
37. The method of claim 24 wherein the inorganic layer includes at least one of an ultraviolet radiation absorbent layer, an infrared radiation absorbent layer, a barrier layer, an electrically conductive layer, an anti-reflective layer, and combinations thereof.
38. The method of claim 37 wherein the barrier layer is a moisture barrier layer having a water vapor transmission rate of less than 0.1 g/m 2 -day at 100% relative humidity and 35° C.
39. The method of claim 37 wherein the barrier layer is an oxygen barrier layer having an oxygen transmission rate of less than 0.1 cc/m 2 -day for oxygen diffusion in a 21% oxygen atmosphere at 25° C.
40. The method of claim 24 wherein the coating has a thickness from about 0.05 microns to about 50 microns.
41. The method of claim 24 wherein the coating has a thickness from about 0.1 micron to about 10 microns.
42. The method of claim 24 wherein the device is an electro-optical device and is one of an electrochromic device, a liquid crystal display, an organic light emitting diode, a light emitting diode, a photovoltaic device, and an x-ray detector.
43. The method of claim 24 wherein the coating further includes a transparent inorganic conductive layer.
44. The method of claim 43 wherein the transparent inorganic conductive layer comprises indium tin oxide.
45. The method of claim 24 wherein at least one of the base and the coating are transparent.