Permeation barrier layer
View Patent ↗The method for manufacturing a hydrogen permeation barrier comprises the steps of a) depositing on a substrate (SUB) a layer system (LS) comprising at least one layer (L 1 ,L 2 ,L 3 ); characterized in that step a) comprises the step of b) depositing at least one hydrogen barrier layer (HPBL) comprising an at least ternary oxide. The apparatus comprises a sealable volume and a wall forming at least a portion of a boundary limiting said volume, wherein said wall comprises a hydrogen permeation barrier comprising a layer system (LS) comprising at least one layer, wherein said layer system comprises at least one hydrogen barrier layer (HPBL) comprising an at least ternary oxide. Preferably, said at least ternary oxide is substantially composed of Al, Cr and O, and said depositing said at least one hydrogen barrier layer (HPBL) is carried out using a physical vapor deposition method, in particular a cathodic arc evaporation method. Preferably, step a) comprises depositing on said substrate at least one of: an adhesion layer (AdhL), a hydrogen storage layer (HStL), a protective layer (ProtL), in particular a thermal barrier layer (ThBL), a diffusion barrier layer (DBL), an oxidation barrier layer (OxBL), a chemical barrier layer (ChBL), a wear resistance layer (WRL). Excellent hydrogen permeation barrier properties can be achieved, and the layer system can be tailored as required by an envisaged application.
1. Method for manufacturing a hydrogen permeation barrier, comprising:
a) depositing directly or indirectly on a substrate a layer system comprising at least one layer;
characterized in that said depositing the at least one layer on the substrate comprises
b) depositing at least one hydrogen barrier layer by vapor deposition of an at least ternary oxide, wherein said at least ternary oxide is substantially composed of Al, Cr and O.
2. The method according to claim 1 , wherein said at least one hydrogen barrier layer is substantially composed of said at least ternary oxide.
3. The method according to claim 1 , wherein said at least ternary oxide comprises a hexagonal crystal structure.
4. The method according to claim 1 , wherein said at least ternary oxide is substantially a solid solution.
5. The method according to claim 1 , wherein said depositing the at least one hydrogen barrier layer is carried out at a substrate temperature of below 600° C.
6. The method according to claim 1 , wherein said depositing said at least one hydrogen barrier layer is carried out using a physical vapor deposition method.
7. The method according to claim 1 , wherein said depositing said at least one hydrogen barrier layer is carried out using a cathodic arc evaporation method.
8. The method according to claim 1 , wherein said depositing the layer system on the substrate is carried out within a vacuum treatment chamber without moving said substrate out of said vacuum treatment chamber.
9. The method according to claim 1 , wherein said depositing the layer system on the substrate comprises, before said depositing the at least one hydrogen barrier layer,
c) depositing on said substrate an adhesion layer for increasing an adhesion of said at least one hydrogen barrier layer on said substrate.
10. The method according to claim 1 , wherein said depositing the layer system on the substrate comprises
e) depositing on said substrate a hydrogen storage layer capable of storing and releasing hydrogen.
11. The method according to claim 1 , wherein said depositing the layer system on the substrate comprises
d) depositing on said substrate a protective layer for protecting at least one layer of said layer system from external influences.
12. The method according to claim 11 , wherein said protective layer is a thermal barrier layer for protecting said at least one layer of said layer system from thermal influences, said thermal barrier layer having a thermal conductivity smaller than a thermal conductivity of at least one other layer of said layer system.
13. The method according to claim 11 , wherein said protective layer is a diffusion barrier layer for reducing a transport of material within, into or out of said layer system, said diffusion barrier layer providing a stronger impediment to transport of material across itself than at least one other layer of said layer system.
14. The method according to claim 11 , wherein said protective layer is an oxidation barrier layer for protecting said at least one layer of said layer system from oxygen, said oxidation barrier layer providing a stronger impediment to transport of oxygen across itself than at least one other layer of said layer system.
15. The method according to claim 11 , wherein said protective layer is a chemical barrier layer for protecting said at least one layer of said layer system from chemically reacting, said chemical barrier layer having a chemical inertness higher than a chemical inertness of at least one other layer of said layer system.
16. The method according to claim 11 , wherein said protective layer is a wear resistance layer for increasing a wear resistance of said at least one layer of said layer system, said wear resistance layer having a higher wear resistance than at least one other layer of said layer system.
17. The method according to claim 1 , wherein said at least ternary oxide comprises at least 6 at % Cr.
18. The method according to claim 17 , wherein said at least ternary oxide comprises less than 24 at % Cr.