Quartz crystal vibrator, oscillator and electronic apparatus
To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portion between the base member and the quartz crystal vibrating plate, the protecting film is provided at the recess portion and the bonding electrode is disposed on the inner side of the recess portion.
1. A quartz crystal vibrator comprising:
a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion;
an inner electrode provided at the quartz crystal vibrating piece for applying a voltage to the quartz crystal vibrating piece;
a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction thereof;
bonding electrodes for bonding provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to the inner electrode; and
a protecting film provided at an outer face of the hermetically closed vessel for protecting the bonding electrode;
wherein recess portions recessed to inner sides of the hermetically closed vessel are provided at an outer edge portion between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate, the protecting film is provided at the recess portion;
wherein the bonding electrode is disposed on the inner side of the recess portion; and
wherein the recess portion comprises a step which defines in the recess portion an outer section open to outside of the quartz crystal vibrator and an inner section located inside the recess portion more internally than the outer section, such that the recess portion is made wider at the outer section than at the inner section.
2. A quartz crystal vibrator comprising:
a quartz piece responsive to application of an electrical signal to vibrate;
an enclosure configured with two halves which sandwich a part of the quartz piece therebetween to hermetically enclose the quartz piece inside thereof;
main electrodes patterned over the quartz piece to supply the electrical signal to the quartz piece, the main electrodes extending over the quartz piece and terminating such that the terminating end of the main electrodes are sandwiched respectively between one of the two halves and the quartz piece and between the other of the two halves and the quartz piece, at positions inside from peripheries of the two halves, wherein the terminating ends of the main electrodes each have a thickness sufficiently thick to form a gap between each of the two halves and the quartz piece, and at least one of the two halves has a surface formed with a step in the gap to increase a volume of the gap; and
a protective material covering in film at least a part of the enclosure and the quartz piece and filling the gap to prevent exposure of the main electrodes to air, wherein the gap is sufficiently wide and deep such that a self-reinforcing amount of protective material fills the gap.