Nanolaminate deformable mirrors
View Patent ↗A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.
1. A method for fabricating a deformable mirror, comprising:
providing a substrate;
coupling a resilient layer to said substrate;
electrically coupling a plurality of electrodes to said resilient layer, wherein each of said electrodes and said resilient layer are adapted to have a respective applied potential so as to dynamically change the shape of said resilient layer;
configuring a nanolaminate with an optical finish of less than about 0.5 nm; and
conformably coupling said nanolaminate to said resilient layer.
2. The method of claim 1 , wherein said nanolaminate comprises alternating layers of different materials.
3. The method of claim 1 , wherein said resilient layer further comprises a layer selected from a continuous spring layer or a patterned spring layer.
4. The method of claim 1 , wherein a plurality of vias are adapted to separate said substrate from said resilient layer.
5. The method of claim 4 , wherein said vias comprise electroplated metal ridges and posts or fabricated photodefinable polymers.
6. The method of claim 1 , wherein a plurality of vias are adapted to separate said resilient layer from said nanolaminate.
7. The method of claim 6 , wherein said vias comprise electroplated metal ridges and posts or fabricated photodefinable polymers.
8. The method of claim 1 , wherein said mirror comprises a clear aperture of up to about one meter.
9. The method of claim 1 , wherein said mirror has a configured resultant pixel density of up to about 1 million pixels/m 2 .
10. The method of claim 1 , wherein said nanolaminate comprises a thickness of down to about 5 microns.
11. The method of claim 1 , wherein said resilient layer comprise a nanolaminate.
12. The method of claim 1 , wherein said substrate comprises a structure selected from: a ribbed structure or stretched base layer.
13. The method of claim 1 , wherein said substrate comprises a material selected from: a nanolaminate foil, glass, silicon, or silicon carbide.
14. A method for fabricating a deformable mirror, comprising:
providing a substrate;
coupling a resilient layer to said substrate;
electrically coupling a plurality of electrodes to said resilient layer, wherein each of said electrodes and said resilient layer are adapted to have a respective applied potential so as to dynamically change the shape of said resilient layer; and
configuring a nanolaminate with a degree of curvature; and
conformably coupling said nanolaminate to said resilient layer so as to produce high spatial frequency displacements.
15. The method of claim 14 , wherein said degree of curvature includes conic shapes selected from convex, concave, elliptical, hyperbolic, and parabolic configurations.
16. The method of claim 14 , wherein said nanolaminate comprises alternating layers of different materials.
17. The method of claim 14 , wherein said resilient layer further comprises a layer selected from a continuous spring layer or a patterned spring layer.
18. The method of claim 14 , wherein a plurality of vias are adapted to separate said substrate from said resilient layer.
19. The method of claim 18 , wherein said vias comprise electroplated metal ridges and posts or fabricated photodefinable polymers.
20. The method of claim 14 , wherein a plurality of vias are adapted to separate said resilient layer from said nanolaminate.
21. The method of claim 20 , wherein said vias comprise electroplated metal ridges and posts or fabricated photodefinable polymers.
22. The method of claim 14 , wherein said mirror comprises a clear aperture of up to about one meter.
23. The method of claim 14 , wherein said mirror has a configured resultant pixel density of up to about 1 million pixels/m 2 .
24. The method of claim 14 , wherein said nanolaminate comprises a thickness of down to about 5 microns.
25. The method of claim 14 , wherein said resilient layer comprise a nanolaminate.
26. The method of claim 14 , wherein said substrate comprises a material selected from: a nanolaminate foil, glass, silicon, or silicon carbide.