IP Library Granted Patent US 8,063,534
Granted Patent B2
US 8,063,534 · App. 12/368,783 · Granted Nov 22, 2011

Surface acoustic wave device and surface acoustic wave oscillator

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Quick Facts
Patent No.
US 8,063,534
App. No.
12/368,783
Granted
Nov 22, 2011
Kind
B2
Abstract

A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, Ψ) of (0°, 95°≦θ≦155°, 33°≦|Ψ|≦46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

Claims (28)

1. A surface acoustic wave device, comprising:

an interdigital transducer at least serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers;

a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, ψ) of (0°, 95°≦θ≦155°, 33°≦|ψ|≦46°);

electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode;

electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned, wherein the surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave;

a reflector formed at both sides of the interdigital transducer so as to sandwich the interdigital transducer in a propagation direction of the surface acoustic wave on a surface of the quartz substrate, the reflector including conductor strips;

conductor strip grooves formed between the conductor strips; and

conductor strip bases being sandwiched between the conductor strip grooves and having upper surfaces on which the conductor strips are formed.

2. The surface acoustic wave device according to claim 1 , wherein fr 1 <f 2 <fr 2 is satisfied, where an upper end frequency of a stop band of the interdigital transducer is ft 2 , a lower end frequency of a stop band of the reflector is fr 1 , and an upper end frequency of the stop band of the reflector is fr 2 .

3. The surface acoustic wave device according to claim 2 , wherein the conductor strip grooves of the reflector are shallower than the electrode finger grooves of the interdigital transducer in depth.

4. A surface acoustic wave device, comprising:

an interdigital transducer at least serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers;

a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, ψ) of (0°, 95°≦θ≦155°, 33°≦|ψ|≦46°);

electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and

electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned, wherein the surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave, wherein

a relation of a value y and a value Hd/H satisfies y=0.1825×(Hd/H) 4 −0.1753×(Hd/H) 3 +0.0726×(Hd/H) 2 −0.0058×(Hd/H)+0.0085, where a line metalization ratio η of the electrode fingers included in the interdigital transducer is 0.8±y, and the value Hd/H is obtained by dividing a thickness Hd of one of the electrode finger bases by a total thickness H of one of the electrode fingers and one of the electrode finger bases.

5. The surface acoustic wave device according to claim 4 , wherein the value Hd/H is 0.167 or more.

6. The surface acoustic wave device according to claim 5 , wherein the value Hd/H is from 0.3 inclusive to 0.833 inclusive.

7. A surface acoustic wave oscillator, comprising:

a surface acoustic wave device, comprising:

an interdigital transducer at least serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers;

a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (φ, θ, ψ) of (0°, 95°≦θ≦155°, 33°≦|ψ|≦46°);

electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode;

electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned, wherein the surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave;

a reflector formed at both sides of the interdigital transducer so as to sandwich the interdigital transducer in a propagation direction of the surface acoustic wave on a surface of the quartz substrate, the reflector including conductor strips;

conductor strip grooves formed between the conductor strips; and

conductor strip bases being sandwiched between the conductor strip grooves and having upper surfaces on which the conductor strips are formed; and

an integrated circuit for driving the interdigital transducer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 18, 2011
From: EPSON TOYOCOM CORPORATION
To: SEIKO EPSON CORPORATION
Reel/Frame 026788/0011 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 10, 2009
From: IIZAWA, KEIGO
To: EPSON TOYOCOM CORPORATION
Reel/Frame 022241/0430 →