Display apparatus and method of manufacturing the same
View Patent ↗In a display apparatus and a method of manufacturing the display apparatus, a first insulating layer having a trench and a second insulating layer having a via hole corresponding to the trench are formed on an array substrate. After forming a seed layer in the trench, a conductive layer is formed on the seed layer through a plating process, thereby forming the gate line, the gate electrode and the storage line accommodated in the trench and the via hole.
1. A display apparatus comprising:
a first substrate;
a first insulating layer provided on the first substrate and formed with a first trench;
a second insulating layer provided on the first insulating layer and formed with a first via hole that faces the first trench;
a gate line accommodated in the first trench and the first via hole;
a data line provided on the gate line, in which the data line crosses the gate line while being insulated from the gate line;
a pixel electrode provided in a pixel area; and
a second substrate facing the first substrate.
2. The display apparatus as claimed in claim 1 , wherein the second insulating layer has an etching selectivity relative to the first insulating layer.
3. The display apparatus as claimed in claim 2 , wherein the second insulating layer comprises at least one of SiOC, SiOF, and an organic substance.
4. The display apparatus as claimed in claim 3 , wherein the first insulating layer comprises at least one of SiOx and SiNx.
5. The display apparatus as claimed in claim 1 , wherein the first substrate comprises a soda-lime glass substrate.
6. The display apparatus as claimed in claim 5 , wherein the second insulating layer has a dielectric constant lower than a dielectric constant of the first substrate.
7. The display apparatus as claimed in claim 1 , further comprising a conductive layer accommodated in the first trench and interposed between the first insulating layer and the gate line.
8. The display apparatus as claimed in claim 1 , wherein the first via hole is wider than the first trench, and has a depth equal to a thickness of the second insulating layer, and the first trench has a depth less than a thickness of the first insulating layer.
9. A display apparatus comprising:
a first substrate;
a first insulating layer provided on the first substrate and formed with a first trench;
a second insulating layer provided on the first insulating layer and formed with a first via hole that faces the first trench;
a gate line accommodated in the first trench and the first via hole;
a data line provided on the gate line, in which the data line crosses the gate line while being insulated from the gate line;
a color filter provided in a pixel area to cover the gate line and the second insulating layer;
a pixel electrode provided in the pixel area; and
a second substrate facing the first substrate.
10. The display apparatus as claimed in claim 9 , further comprising:
a thin film transistor provided in the pixel area and electrically connected to the pixel electrode; and
a storage line accommodated in a second trench formed in the first insulating layer and a second via hole in the second insulating layer that faces the second trench, wherein
the thin film transistor comprises:
a gate electrode that branches from the gate line and is accommodated in a third trench formed in the first insulating layer and a third via hole in the second insulating layer that faces the third trench;
an active pattern that overlaps with the gate electrode;
a source electrode that branches from the data line; and
a drain electrode spaced apart from the source electrode.
11. The display apparatus as claimed in claim 9 , wherein the second insulating layer has an etching selectivity relative to the first insulating layer.
12. The display apparatus as claimed in claim 11 , wherein the second insulating layer comprises at least one of SiOC, SiOF, and an organic substance.
13. The display apparatus as claimed in claim 12 , wherein the first insulating layer comprises at least one of SiOx and SiNx.
14. The display apparatus as claimed in claim 9 , wherein the color filter is disposed between the gate line and the data line, and a surface of the color filter is substantially flat.
15. The display apparatus as claimed in claim 9 , wherein the first substrate comprises a soda-lime glass substrate.
16. The display apparatus as claimed in claim 9 , further comprising a conductive layer accommodated in the first trench and interposed between the first insulating layer and the gate line.
17. The display apparatus as claimed in claim 9 , wherein the first substrate comprises a soda-lime glass substrate, and the second insulating layer has a dielectric constant lower than a dielectric constant of the first substrate.