Magnetic recording medium having ion-implanted parts
View Patent ↗Embodiments of the present invention provide recording area separated magnetic recording media (DTMs, BPMs) allowing magnetic heads to fly lower. According to one embodiment, the recording area separated magnetic recording media are configured so that magnetic recording layers have parts with the relatively higher element ratio of a ferromagnetic material, and parts with the lower element ratio of the ferromagnetic material, occurring periodically in the in-plane direction, and the average height from the substrate surface of the parts with the relatively higher element ratio of a ferromagnetic material is higher than the average height from the substrate surface of the parts with the lower element ratio of the ferromagnetic material. In producing recording area separated magnetic recording media with the element ratio of a ferromagnetic material relatively lowered by ion implantation, preliminarily etching the part to be ion implanted makes the height after ion implantation relatively lower than the non-implanted part.
1. A magnetic recording medium comprising:
a substrate;
magnetic recording layers formed on the substrate;
the magnetic recording layers both include parts with a relatively higher element ratio of a ferromagnetic material, and parts with a relatively lower element ratio of a ferromagnetic material, which are provided periodically in the in-plane direction,
an average height from a substrate surface of the parts with a relatively higher element ratio of a ferromagnetic material is higher than an average height from the substrate surface of the parts with a relatively lower element ratio of a ferromagnetic material, by between about 0.1-3 nm; and
a nonmagnetic element is ion implanted into the parts with a relatively lower element ratio of the ferromagnetic material, and the nonmagnetic element extends through an uppermost one of the magnetic recording layers, and only partially through a magnetic recording layer beneath said uppermost one of the magnetic recording layers.
2. The magnetic recording medium according to claim 1 , wherein the magnetic recording medium is a discrete track type in which the parts with a relatively higher element ratio of the ferromagnetic material and the parts with a relatively lower element ratio of the ferromagnetic material are continuous in the circumferential direction and periodic in the radial direction.
3. The magnetic recording medium according to claim 1 , wherein the magnetic recording medium further comprises an adhesion layer, a soft magnetic layer, a seed layer, an intermediate layer, the magnetic recording layer comprises two layers, and a pre-mask layer.
4. The magnetic recording medium according to claim 3 , wherein the adhesion layer is AlTi, the seed layer is NiW, the intermediate layer is Ru, the magnetic recording layer comprises two Co-based alloy granular magnetic layers, and the pre-mask layer is Ta.
5. The magnetic recording medium according to claim 3 , wherein the soft magnetic layer is a laminated film of a lower soft magnetic layer, an antiferromagnetic coupling layer, and an upper soft magnetic layer.
6. The magnetic recording medium according to claim 5 , wherein the lower and upper soft magnetic layers are FeCo-based, and the antiferromagnetic coupling layer is Ru.
7. A magnetic recording medium comprising:
a substrate, an adhesion layer, a soft magnetic layer, a seed layer, an intermediate layer, a magnetic recording layer, and a pre-mask layer;
the magnetic recording layer includes parts with a relatively higher element ratio of a ferromagnetic material, and parts with a relatively lower element ratio of a ferromagnetic material, which are provided periodically in the in-plane direction;
an average height from a substrate surface of the parts with the relatively higher element ratio of the ferromagnetic material is higher than an average height from the substrate surface of the parts with the relatively lower element ratio of the ferromagnetic material,
by between about 0.1-3 nm;
the magnetic recording medium is a discrete track type in which the parts with the relatively higher element ratio of the ferromagnetic material and the parts with the relatively lower element ratio of the ferromagnetic material are continuous in the circumferential direction and periodic in the radial direction; and
a nonmagnetic element is ion implanted into the parts with a relatively lower element ratio of the ferromagnetic material; and
the nonmagnetic element extends through an uppermost one of the magnetic recording layers, and only partially through a magnetic recording layer beneath said uppermost one of the magnetic recording layers.
8. The magnetic recording medium according to claim 7 , wherein the adhesion layer is AlTi, the seed layer is NiW, the intermediate layer is Ru, the magnetic recording layer comprises two Co-based alloy granular magnetic layers, and the pre-mask layer is Ta.
9. The magnetic recording medium according to claim 7 , wherein the soft magnetic layer is a laminated film of a lower soft magnetic layer, an antiferromagnetic coupling layer, and an upper soft magnetic layer.
10. The magnetic recording medium according to claim 9 , wherein the lower and upper soft magnetic layers are FeCo-based, and the antiferromagnetic coupling layer is Ru.
11. A magnetic recording medium comprising:
a substrate;
magnetic recording layers formed on the substrate;
the magnetic recording layers both include parts with a relatively higher element ratio of a ferromagnetic material, and parts with a relatively lower element ratio of a ferromagnetic material, which are provided periodically in the in-plane direction; and
a nonmagnetic element is ion implanted into the parts with the relatively lower element ratio of the ferromagnetic material, and that a height of the ion implanted parts relative to a height of the non-implanted parts is within the range of −3 nm or more to 3 nm or less, such that the magnetic recording medium has a glide noise is 30 mV or less.
12. The magnetic recording medium according to claim 11 , wherein the magnetic recording medium is a discrete track type in which the parts with the relatively higher element ratio of the ferromagnetic material and the parts with the relatively lower element ratio of the ferromagnetic material are continuous in the circumferential direction and periodic in the radial direction.