Method for manufacturing perpendicular magnetic recording head
View Patent ↗Embodiments of the present invention help to provide a method for manufacturing a perpendicular magnetic recording head including a main magnetic pole having a width that does not generally vary. According to one embodiment, a magnetic film, a first inorganic mask film, an organic film, a second inorganic mask film, and a resist pattern are formed in this order. Reactive ion etching (RIE) is performed using the resist pattern as a mask to etch the second inorganic mask film and the organic film and form a mask for the subsequent step. A flow rate of an Ar gas is then controlled, and ion milling is performed, to correct a difference between the width of the mask located at the central portion of the wafer and the width of the mask located at the outer peripheral portion of the wafer. The magnetic film is processed to have a uniform track width. Ion milling is then performed to form the main magnetic pole having an inverted trapezoidal shape.
1. A method for manufacturing a perpendicular magnetic recording head, comprising:
forming a main magnetic pole;
forming an auxiliary magnetic pole; and
forming a coil, wherein forming the main magnetic pole includes:
forming a magnetic film above a wafer;
forming a mask member on the magnetic film;
performing reactive ion etching (RIE) on the mask member to form a mask; and
performing ion milling on the mask under a condition that a milling rate at a central portion of the wafer is higher than a milling rate at an outer peripheral portion of the wafer in order to correct a difference between a large width of the mask located at the central portion of the wafer and a small width of the mask located at the outer peripheral portion of the wafer, and performing ion milling on the magnetic film, the difference occurring during the reactive ion etching (RIE).
2. The method according to claim 1 , wherein a flow rate of an Ar gas is controlled in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer in performing the ion milling on the mask and performing the ion milling on the magnetic film.
3. The method according to claim 2 , wherein the flow rate of the Ar gas is 24 sccm or more.
4. The method according to claim 1 , wherein pressure of the Ar gas is controlled in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer in performing the ion milling on the mask and performing the ion milling on the magnetic film.
5. The method according to claim 1 , wherein power supplied to a plasma source is controlled in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer in performing the ion milling on the mask and performing the ion milling on the magnetic film.
6. The method according to claim 1 , wherein an ion acceleration current is controlled in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer in performing the ion milling on the mask and performing the ion milling on the magnetic film.
7. The method according to claim 1 , further comprising controlling a combination of a flow rate of an Ar gas, a pressure of the Ar gas, a power supplied to a plasma source, and an ion acceleration current in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer when performing the ion milling on the mask and performing the ion milling on the magnetic film.
8. The method according to claim 1 , wherein the mask member is a film formed by laminating a first inorganic film made of Al 2 O 3 , an organic film, and a second inorganic film made of SiO 2 .
9. The method according to claim 1 , further comprising forming a read head before forming the main magnetic pole, the auxiliary magnetic pole; and the coil.
10. The method according to claim 9 , wherein forming the read head includes forming a magnetoresistance effect element between a lower magnetic shield and an upper magnetic shield, and wherein the magnetoresistance effect element is selected from a giant magnetoresistance effect (GMR) element, a tunnel magnetoresistance effect (TMR) element, and a current perpendicular to plane (CPP) giant magnetoresistance effect (GMR) element capable of causing a current to flow perpendicularly to a film surface.
11. A method for manufacturing a perpendicular magnetic recording head, the method comprising:
forming a first auxiliary magnetic pole above a wafer;
forming a coil above the first auxiliary magnetic pole;
forming a magnetic film above the coil;
forming a mask member on the magnetic film;
performing reactive ion etching (RIE) on the mask member to form a mask; and
performing ion milling on the mask under a condition that a milling rate at a central portion of the wafer is higher than a milling rate at an outer peripheral portion of the wafer in order to correct a difference between a large width of the mask located at the central portion of the wafer and a small width of the mask located at the outer peripheral portion of the wafer, and performing ion milling on the magnetic film to form a main magnetic pole, the difference occurring during the reactive ion etching (RIE); and
cutting the wafer.
12. The method according to claim 11 , further comprising controlling a combination of a flow rate of an Ar gas, a pressure of the Ar gas, a power supplied to a plasma source, and an ion acceleration current in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer when performing the ion milling on the mask and performing the ion milling on the magnetic film.
13. The method according to claim 11 , further comprising forming a second auxiliary magnetic pole above the main magnetic pole.
14. The method according to claim 11 , further comprising forming a read head before forming the first auxiliary magnetic pole.
15. A method for manufacturing a perpendicular magnetic recording head, comprising the steps of:
forming a magnetic film above a wafer;
forming a mask member on the magnetic film;
performing reactive ion etching (RIE) on the mask member to form a mask;
performing ion milling on the mask under a condition that a milling rate at a central portion of the wafer is higher than a milling rate at an outer peripheral portion of the wafer in order to correct a difference between a large width of the mask located at the central portion of the wafer and a small width of the mask located at the outer peripheral portion of the wafer, and performing ion milling on the magnetic film to form a main magnetic pole, the difference occurring during the reactive ion etching (RIE);
forming a coil above the main magnetic pole;
forming an auxiliary magnetic pole above the coil; and
cutting the wafer.
16. The method according to claim 15 , further comprising controlling a combination of a flow rate of an Ar gas, a pressure of the Ar gas, a power supplied to a plasma source, and an ion acceleration current in order to set the milling rate at the central portion of the wafer to be higher than the milling rate at the outer peripheral portion of the wafer when performing the ion milling on the mask and performing the ion milling on the magnetic film.
17. The method according to claim 15 , further, comprising forming a read head before the step of forming the magnetic film.