Magnetic head and manufacturing method thereof
View Patent ↗Embodiments of the present invention provide a magnetic head having a read head of stable reading operation and with less magnetic fluctuation noise. According to one embodiment, a free layer has a structure comprising two ferromagnetic layers (a first free layer and a second free layer) that are coupled anti-ferromagnetically by way of a non-magnetic intermediate layer, in which the magnetization amount of the first free layer is set to larger than the magnetization amount of the second free layer. Further, the magnetic domains in the first free layer and the second free layer are stabilized simultaneously by increasing the distance between the second free layer and the magnetic domain control film to be more than the distance between the first free layer and the magnetic domain control film, thereby adjusting the magnetization amount of the magnetic domain control film. Further, the volume of the entire free layer is increased thereby greatly decreasing the magnetic fluctuation noises, to obtain a read head showing a high SN ratio.
1. A magnetic head comprising:
a lower magnetic shield layer;
an upper magnetic shield layer;
a magnetoresistive film disposed between the lower magnetic shield layer and the upper magnetic shield layer, the magnetoresistive film having a pinned layer, an intermediate layer, and a free layer; and
a magnetic domain control film disposed on both ends in the direction of the track width of the magnetoresistive film;
wherein the free layer has a first free layer and a second free layer stacked with a non-magnetic intermediate layer between, the first free layer being stacked on the intermediate layer over the pinned layer, magnetization in the first free layer and magnetization in the second free layer being in anti-parallel with each other, and a magnetization amount of the first free layer being larger than a magnetization amount of the second free layer, and
wherein Sp 2 >Sp 1 is satisfied when assuming a distance between the first free layer and the magnetic domain control film is Sp 1 , and a distance between the second free layer and the magnetic domain control film is Sp 2 .
2. The magnetic head according to claim 1 , wherein the relation between Sp 1 and Sp 2 is Sp 2 >2×Sp 1 .
3. The magnetic head according to claim 1 , wherein the Sp 1 is a distance between the center of the first free layer in the direction of its thickness and the magnetic domain control film, and the Sp 2 is a distance between the center of the second free layer in the direction of its thickness and the magnetic domain control film.
4. The magnetic head according to claim 1 , comprising a lower electrode layer disposed above the lower magnetic shield layer, and an upper electrode layer disposed below the upper magnetic shield layer.
5. The magnetic head according to claim 1 , wherein the free layer 1 and the second free layer each comprise two or more ferromagnetic layers by way of a non-magnetic metal layer, and magnetizations in each of the ferromagnetic layers are in parallel with each other.
6. The magnetic head according to claim 1 , wherein the non-magnetic intermediate layer is at least one element selected from the group consisting of Ta, Cu, Ru, Cr, Ir, and Rh.
7. The magnetic head according to claim 1 , comprising a write head disposed adjacent to the upper magnetic shield layer.
8. A magnetic head comprising:
a lower magnetic shield layer;
an upper magnetic shield layer;
a magnetoresistive film disposed between the lower magnetic shield layer and the upper magnetic shield layer, the magnetoresistive film having a pinned layer, an intermediate layer and a free layer; and
a magnetic domain control film disposed on both ends in the direction of the track width of the magnetoresistive film;
wherein the free layer has a first free layer and a second free layer stacked with a non-magnetic intermediate layer between, the first free layer being stacked on the intermediate layer over the pinned layer, magnetization in the first free layer and magnetization of second free layer being in anti-parallel with each other, and a product of a saturation magnetic flux density of the first free layer and a thickness of the first free layer (Bs·t) 1 being larger than a product of a saturation magnetic flux density of the second free layer and a thickness of the second free layer (Bs·t) 2 , and
wherein (Br·t) PM ≧(9×Sp 1 /ts)×{(Bs·t) 1 −(Bs·t) 2 } and H AF2 >H bias2 are satisfied when a distance between the first free layer and the magnetic domain control film is Sp 1 , a distance between the second free layer and the magnetic domain control film is Sp 2 , a distance between the first free layer and the upper magnetic shield is ts, a product of the residual magnetic flux density of the magnetic domain control film and a thickness of the magnetic domain control film as (Br·t) PM , an anti-ferromagnetic coupling field to be applied to the second free layer is H AF2 , and the magnetic domain control field to be applied to the second free layer as H bias2 .
9. The magnetic head according to claim 8 , wherein the relation between the Sp 1 and the Sp 2 is Sp 2 >Sp 1 for satisfying H AF2 >H bias2 .
10. The magnetic head according to claim 9 , wherein the relation between the Sp 1 and the Sp 2 is Sp 2 >2×Sp 1 .
11. The magnetic head according to claim 8 , wherein the Sp 1 is a distance between the center of the first free layer in the direction of its thickness and the magnetic domain control film, and the Sp 2 is a distance between the center of the second free layer in the direction of its thickness and the magnetic domain control film.
12. The magnetic head according to claim 8 , comprising a lower electrode layer disposed above the lower magnetic shield layer, and an upper electrode layer disposed below the upper magnetic shield layer.
13. The magnetic head according to claim 8 , comprising a write head adjacent to the upper magnetic shield layer.
14. A method of manufacturing a magnetic head comprising the steps of:
forming a lower magnetic shield layer;
stacking a pinned layer, an intermediate layer, a first free layer, a non-magnetic intermediate layer, and a second free layer above the lower magnetic shield layer thereby forming a magnetoresistive film, in which magnetization in the first free layer and magnetization in the second free layer are in anti-parallel with each other, and the magnetization amount in the first free layer is larger than the magnetization amount in the second free layer;
forming a magnetic domain control film on both ends in the direction of the track width of the magnetoresistive film, in which Sp 2 >Sp 1 is satisfied when assuming a distance between the center of the first free layer in the direction of its thickness and the magnetic domain control film is Sp 1 and a distance between the center of the second free layer in the direction of its thickness and the magnetic domain control film is Sp 2 ; and
forming an upper magnetic shield layer above the magnetoresistive film and the magnetic domain control film.
15. The manufacturing method of a magnetic head according to claim 14 , wherein the step of forming the magnetic domain control film includes a step of controlling the incident direction of sputtered magnetic particles so as to satisfy Sp 2 >Sp 1 .
16. The manufacturing method of a magnetic head according to claim 14 , wherein the step of forming the magnetic domain control film includes a step of forming a hard magnetic film and a step of patterning the hard magnetic film by ion milling so as to satisfy Sp 2 >Sp 1 .