Semiconductor device
View Patent ↗In a semiconductor device having a Low-k film as an interlayer insulator, peeling of the interlayer insulator in a thermal cycle test is prevented, thereby providing a highly reliable semiconductor device. In a semiconductor device having a structure in which interlayer insulators in which buried wires each having a main electric conductive layer made of copper are formed and cap insulators of the buried wires are stacked, the cap insulator having a relatively high Young's modulus and contacting by its upper surface with the interlayer insulator made of a Low-k film having a relatively low Young's modulus is formed so as not to be provided in an edge portion of the semiconductor device.
1. A semiconductor device comprising a semiconductor chip of a planer rectangular shape, wherein
the semiconductor chip includes:
a semiconductor substrate having a semiconductor element formed on a main surface thereof and patterned into the planer rectangular shape;
a first insulator formed on the main surface of the semiconductor substrate;
a first wire formed by filling an electric conductive film in a first trench portion formed in the first insulator;
a second insulator formed on the first insulator and the first wire; and
a third insulator formed on the second insulator so as to contact the second insulator,
wherein the second insulator has a higher Young's modulus compared to the third insulator,
wherein the second insulator is made of a SiN film, a SiCN film, a SiCO film, or a stacked film thereof,
wherein the third insulator is a film formed closest to the semiconductor substrate side of films made of a material having a relatively lower dielectric constant than a silicon oxide film deposited by CVD method,
wherein the second insulator is removed in only a first region corresponding to a planar outer periphery of the semiconductor chip, and
wherein the semiconductor chip is sealed by a resin.
2. The semiconductor device according to claim 1 , wherein
the electric conductive film contains copper as a main component.
3. The semiconductor device according to claim 1 , wherein
the first region includes at least a planar corner portion of the semiconductor chip.
4. The semiconductor device according to claim 3 , wherein
the first region includes at least a region of 1 μm to 5 μm from the planar corner portion of the semiconductor chip.
5. The semiconductor device according to claim 4 , wherein
the first region includes at least a region of 1 μm to 5 μm from planar four sides of the semiconductor chip.
6. The semiconductor device according to claim 5 , wherein
a width of the first region from the planar corner portion of the semiconductor chip is larger than that from the planar four sides.
7. The semiconductor device according to claim 1 , wherein
a circuit formation region is defined in a plane in the semiconductor chip,
the first wire is formed within the circuit formation region in a plane,
a second trench portion is formed in the first insulator so as to surround the circuit formation region in a plane,
a second wire is formed by filling the electric conductive film in the second trench portion, and
the first region is arranged outside the second wire in a plane.
8. The semiconductor device according to claim 1 , further comprising:
a third wire formed by filling the electric conductive film in a third trench portion formed in the third insulator, wherein
a plurality of wiring layers are formed on the main surface of the semiconductor substrate,
the plurality of the wiring layers are formed by stacking the third insulator, the third wire, and the second insulator, and
at least the second insulator in the lowermost layer among the plurality of layers of the second insulators is removed in the first region.
9. A semiconductor device comprising a semiconductor chip of a planer rectangular shape, wherein
the semiconductor chip includes:
a semiconductor substrate having a semiconductor element formed on a main surface thereof and patterned into the planer rectangular shape;
a first insulator formed on the main surface of the semiconductor substrate;
a first wire formed by filling an electric conductive film in a first trench portion formed in the first insulator;
a second insulator formed on the first insulator and the first wire; and
a third insulator formed on the second insulator so as to contact the second insulator,
the third insulator has a lower degree of adhesion with upper- and lower-layer films compared to the second insulator,
the second insulator is made of a SiN film, a SiCN film, a SiCO film, or a stacked film thereof,
the third insulator is a film formed closest to the semiconductor substrate side of films made of a material having a relatively lower dielectric constant than a silicon oxide film deposited by CVD method,
the second insulator is removed in only a first region corresponding to a planar outer periphery of the semiconductor chip, and
the semiconductor chip is sealed by a resin.
10. The semiconductor device according to claim 9 , wherein
the electric conductive film contains copper as a main component.
11. The semiconductor device according to claim 9 , wherein
the first region includes at least a planar corner portion of the semiconductor chip.
12. The semiconductor device according to claim 11 , wherein
the first region includes at least a region of 1 μm to 5 μm from the planar corner portion of the semiconductor chip.
13. The semiconductor device according to claim 12 , wherein
the first region includes at least a region of 1 μm to 5 μm from planar four sides of the semiconductor chip.
14. The semiconductor device according to claim 13 , wherein
a width of the first region from the planar corner portion of the semiconductor chip is larger than that from the planar four sides.
15. The semiconductor device according to claim 9 , wherein
a circuit formation region is defined in a plane in the semiconductor chip,
the first wire is formed within the circuit formation region in a plane,
a second trench portion is formed in the first insulator so as to surround the circuit formation region in a plane,
a second wire is formed by filling the electric conductive film in the second trench portion, and
the first region is arranged outside the second wire in a plane.
16. The semiconductor device according to claim 9 , further comprising:
a third wire formed by filling the electric conductive film in a third trench portion formed in the third insulator, wherein
a plurality of wiring layers are formed on the main surface of the semiconductor substrate,
the plurality of the wiring layers are formed by stacking the third insulator, the third wire, and the second insulator, and
at least the second insulator in the lowermost layer among the plurality of layers of the second insulators is removed in the first region.