Thin film transistor and display
View Patent ↗A thin film transistor capable of reliably preventing the entry of light into an active layer, and a display including the thin film transistor are provided. A thin film transistor includes: a gate electrode; an active layer; and a gate insulating film arranged between the gate electrode and the active layer, the gate insulating film including a first insulating film, a first light-absorbing layer and a second insulating film, the first insulating film arranged in contact with the gate electrode, the first light-absorbing layer arranged in contact with the first insulating film and made of a material absorbing light of 420 nm or less, the second insulating film arranged between the first light-absorbing layer and the active layer.
1. A thin film transistor comprising:
a gate electrode;
an active layer;
a source electrode and a drain electrode on the active layer;
a gate insulating film arranged between the gate electrode and the active layer, the gate insulating film including a first insulating film, a first light-absorbing layer and a second insulating film, the first insulating film being arranged in contact with the gate electrode, the first light-absorbing layer being arranged in contact with the first insulating film and being made of silicon carbide, and the second insulating film being arranged between the first light-absorbing layer and the active layer;
an interlayer insulating film covering the gate electrode, the gate insulating film, the active layer, and the source and drain electrodes, the interlayer insulating film being arranged in contact with the source and drain electrodes; and
a second light-absorbing layer arranged in contact with the interlayer insulating film, the second light-absorbing layer being made of silicon carbide.
2. The thin film transistor according to claim 1 , wherein:
the first insulating film and the second insulating film are made of at least one of silicon oxide and silicon nitride.
3. The thin film transistor according to claim 1 , wherein the active layer is made of an oxide semiconductor.
4. The thin film transistor according to claim 2 , wherein the first light-absorbing layer has a thickness of 10 nm to 100 nm both inclusive.
5. A display comprising a thin film transistor and a display device on a substrate,
wherein the thin film transistor includes:
a gate electrode;
an active layer;
a source electrode and a drain electrode on the active layer;
a gate insulating film arranged between the gate electrode and the active layer, the gate insulating film including a first insulating film, a first light-absorbing layer and a second insulating film, the first insulating film being arranged in contact with the gate electrode, the first light-absorbing layer being arranged in contact with the first insulating film and being made of silicon carbide, and the second insulating film being arranged between the first light-absorbing layer and the active layer;
an interlayer insulating film covering the gate electrode, the gate insulating film, the active layer, and the source and drain electrodes, the interlayer insulating film being arranged in contact with the source and drain electrodes; and
a second light-absorbing layer arranged in contact with the interlayer insulating film, the second light-absorbing layer being made of silicon carbide.