Semiconductor laser device
View Patent ↗A semiconductor laser device has a red laser element and an infrared laser element on a substrate. The red laser element has a double hetero structure in which an InGaP-based or AlGaInP-based active layer is interposed between a first conductivity type cladding layer and a second conductivity type cladding layer having a ridge. The infrared laser element has a double hetero structure in which a GaAs-based or AlGaAs-based active layer is interposed between a first conductivity type cladding layer and a second conductivity type cladding layer having a ridge. Provided that a first electrode formed over the second conductivity type cladding layer has a width W 1 in a direction perpendicular to a cavity length direction and a second electrode formed over the second conductivity type cladding layer has a width W 2 in a direction perpendicular to a cavity length direction, the relations of W 1 >W 2 and 80 μm≧W 2 ≧60 μm are satisfied.
1. A semiconductor laser device, comprising:
a red semiconductor laser element; and
an infrared semiconductor laser element,
wherein the red semiconductor laser element and the infrared semiconductor laser element are integrated on a same substrate,
the red semiconductor laser element has a double hetero structure in which a red-side active layer made of an InGaP-based or AlGaInP-based material is interposed between a red-side first conductivity type cladding layer and a red-side second conductivity type cladding layer having a ridge for current injection,
the infrared semiconductor laser element has a double hetero structure in which an infrared-side active layer made of a GaAs-based or AlGaAs-based material is interposed between an infrared-side first conductivity type cladding layer and an infrared-side second conductivity type cladding layer having a ridge for current injection,
the red-side second conductivity type cladding layer, and the infrared-side second conductivity type cladding layer are made of an AlGaInP-based material,
where a first electrode formed over the red-side second conductivity type cladding layer has a width W 1 in a direction perpendicular to a cavity length direction, a distance between an end of the infrared laser, and an end of a first electrode formed on the red-side second conductivity type cladding layer in a direction perpendicular to a cavity length direction is a distance ΔW 1 , a second electrode formed over the infrared-side second conductivity type cladding layer has a width W 2 in a direction perpendicular to a cavity length direction, and a distance between the end of the red laser, and an end of a second electrode formed on the infrared-side second conductivity type cladding layer in a direction perpendicular to a cavity length direction is a distance ΔW 2 , the relations of W 1 >W 2 , 90 μm≧W 1 ≧70 μm, 80 μm≧W 2 ≧60 μm, 5 μm≧ΔW 1 ≧15 μm, and 5 μm≧ΔW 2 ≧15 μm are all satisfied, and
the first electrode and the second electrode are mounted on the semiconductor laser device by a connection to a submount made of AlN, Si, or SiC.
2. The semiconductor laser device of claim 1 , wherein
the red-side first conductivity type cladding layer, and the infrared-side first conductivity type cladding layer are made of an AlGaInP-based material.
3. The semiconductor laser device of claim 1 , wherein
the infrared-side first conductivity type cladding layer is made of an AlGaAs-based material.