Semiconductor device
View Patent ↗Provided is a semiconductor device. A well region ( 2 ) formed on a semiconductor substrate ( 1 ) includes a plurality of trench regions ( 12 ), and a source electrode ( 10 ) is connected to a source region ( 6 ) formed on a substrate surface between the trench regions ( 12 ). Adjacently to the source region ( 6 ), a high concentration region ( 11 ) is formed, which is brought into butting contact with the source electrode ( 10 ) together with the source region ( 6 ), whereby a substrate potential is fixed. A drain region ( 5 ) is formed at a bottom portion of the trench region ( 12 ), whose potential is taken to the substrate surface by a drain electrode ( 9 ) buried inside the trench region ( 12 ). An arbitrary voltage is applied to a gate electrode ( 4 a, 4 b ), and the drain electrode ( 9 ), whereby carriers flow from the source region ( 6 ) to the drain region ( 5 ) and the semiconductor device is in an on-state.
1. A semiconductor device, comprising:
a first conductivity type well region disposed on a surface of a semiconductor substrate at a predetermined depth;
a plurality of trench regions disposed at a depth smaller than the predetermined depth of the first conductivity type well region;
a gate electrode disposed on a side surface of each of the plurality of trench regions via a gate insulating film and brought into contact with the gate insulating film;
a second conductivity type drain region disposed at a part of a bottom of each of the plurality of trench regions, wherein a width of the drain region is less than a width of the trench region and lateral sides of the drain region are apart from corresponding sides of the trench region by at least a thickness of the gate insulating film;
a second conductivity type source region disposed in a region formed between the plurality of trench regions, and disposed on the surface of the semiconductor substrate along the gate insulating film; and
a first conductivity type high concentration region disposed in a region formed between the plurality of trench regions, and disposed on the surface of the semiconductor substrate to be brought into contact with the second conductivity type source region.
2. A semiconductor device according to claim 1 , further comprising a second conductivity type low concentration diffusion region formed between the semiconductor substrate and the first conductivity type well region to surround the second conductivity type drain region.
3. A semiconductor device, comprising:
a first conductivity type well region disposed on a surface of a semiconductor substrate at a predetermined depth;
a plurality of trench regions disposed at a depth smaller than the predetermined depth of the first conductivity type well region;
a gate electrode disposed on a side surface of each of the plurality of trench regions via a gate insulating film and brought into contact with the gate insulating film;
a second conductivity type drain region disposed in a bottom portion of each of the plurality of trench regions;
a second conductivity type source region disposed in a region formed between the plurality of trench regions, and disposed on the surface of the semiconductor substrate along the gate insulating film;
a first conductivity type high concentration region disposed in a region formed between the plurality of trench regions, and disposed on the surface of the semiconductor substrate to be brought into contact with the second conductivity type source region; and
a second conductivity type low concentration diffusion region formed between the semiconductor substrate and a bottom surface of the first conductivity type well region.
4. A semiconductor device according to claim 3 , wherein the second conductivity type low concentration diffusion region surrounds the second conductivity type drain region.