Trench process and structure for backside contact solar cells with polysilicon doped regions
View Patent ↗A solar cell includes polysilicon P-type and N-type doped regions on a backside of a substrate, such as a silicon wafer. An interrupted trench structure separates the P-type doped region from the N-type doped region in some locations but allows the P-type doped region and the N-type doped region to touch in other locations. Each of the P-type and N-type doped regions may be formed over a thin dielectric layer. Among other advantages, the resulting solar cell structure allows for increased efficiency while having a relatively low reverse breakdown voltage.
1. A solar cell structure comprising:
a doped silicon substrate having a front side configured to face the sun during normal operation and a backside opposite the front side;
a P-type doped region and an N-type doped region comprising polysilicon, wherein the P-type doped region and the N-type doped region are physically separate in one location and touch each other forming a butting junction in another location;
a first dielectric layer between the substrate and the P-type doped region and the N-type doped region; and
a second dielectric layer formed over the P-type doped region and the N-type doped region.
2. The solar cell structure of claim 1 wherein the first dielectric layer comprises silicon dioxide formed to a thickness between 5 to 40 Angstroms on a surface of the silicon substrate.
3. The solar cell structure of claim 1 wherein the P-type doped region and the N-type doped region are physically separated by an interrupted trench structure.
4. The solar cell structure of claim 1 further comprising:
a passivation layer between the second dielectric layer and the substrate.
5. The solar cell structure of claim 3 further comprising a diffused passivation region in the substrate under the interrupted trench structure, wherein the passivation region is doped with an N-type dopant.
6. The solar cell structure of claim 1 further comprising interdigitated metal contact fingers electrically coupled to the P-type and N-type doped regions through the second dielectric layer.
7. A solar cell comprising:
a P-type doped region and an N-type doped region formed on a backside of a doped silicon substrate, the P-type doped region and the N-type doped region comprising polysilicon, each of the P-type and N-type doped regions being formed over a dielectric layer that is formed between the silicon substrate and the P-type and N-type doped regions; and
an interrupted trench structure separating the P-type doped region and the N-type doped region and dividing the dielectric layer, the interrupted trench structure allowing the P-type doped region and the N-type doped region to touch in a first location.
8. The solar cell of claim 7 wherein the silicon substrate comprises an N-type silicon substrate.
9. The solar cell of claim 7 further comprising a second location where the P-type doped region and the N-type doped region touch.
10. The solar cell of claim 9 wherein the first and second locations are in a same region having substantially same local operating temperature.
11. The solar cell of claim 7 wherein the first location is the only location in the solar cell where the P-type doped region and the N-type doped region touch.
12. The solar cell of claim 7 further comprising a passivation layer formed on a surface of the interrupted trench structure.